Springer Series in Materials Science

Evolution of Thin Film Morphology

Modeling and Simulations

Authors: Pelliccione, Matthew, Lu, Toh-Ming

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  • Presents basic modeling and simulation tools for quantitative description of thin film morphological evolution
  • Displays clear conceptual developments in the fundamental understanding of complex surface growth phenomena
  • Provides a close connection between modeling and simulations and various practical deposition methodologies
  • Requires minimum mathematical and computer programming backgrounds to learn the subject
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eBook $119.00
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  • ISBN 978-0-387-75109-2
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Hardcover $199.99
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Softcover $159.99
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About this book

Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem both through numerical calculations based on Langevin continuum equations, and through Monte Carlo simulations based on discrete surface growth models when an analytical formulism is not convenient. Evolution of Thin-Film Morphology will be of benefit to university researchers and industrial scientists working in the areas of semiconductor processing, optical coating, plasma etching, patterning, micro-machining, polishing, tribology, and any discipline that requires an understanding of thin film growth processes. In particular, the reader will be introduced to the mathematical tools that are available to describe such a complex problem, and appreciate the utility of the various modeling methods through numerous example discussions. For beginners in the field, the text is written assuming a minimal background in mathematics and computer programming. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition.

Table of contents (10 chapters)

Table of contents (10 chapters)

Buy this book

eBook $119.00
price for USA in USD
  • ISBN 978-0-387-75109-2
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • Immediate eBook download after purchase and usable on all devices
  • Bulk discounts available
Hardcover $199.99
price for USA in USD
Softcover $159.99
price for USA in USD
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Bibliographic Information

Bibliographic Information
Book Title
Evolution of Thin Film Morphology
Book Subtitle
Modeling and Simulations
Authors
Series Title
Springer Series in Materials Science
Series Volume
108
Copyright
2008
Publisher
Springer-Verlag New York
Copyright Holder
Springer-Verlag New York
eBook ISBN
978-0-387-75109-2
DOI
10.1007/978-0-387-75109-2
Hardcover ISBN
978-0-387-75108-5
Softcover ISBN
978-1-4419-2580-0
Series ISSN
0933-033X
Edition Number
1
Number of Pages
XII, 206
Topics