MEMS Materials and Processes Handbook
Editors: Ghodssi, Reza, Lin, Pinyen (Eds.)
Free Preview- Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS. Discusses specific MEMS fabrication techniques that fall into three primary categories: Additive, Subtractive, Lithography/patterning, as well as wafer Bonding, Doping, Surface Treatment/preparation, and Characterization Techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication
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- About this book
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MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.
- Reviews
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From the reviews:
“In this handbook, editors Ghodssi (Univ. of Maryland, College Park) and Lin (Touch Micro-system Technology, Taiwan) have essentially organized the collective knowledge of decades of MEMS research from around the world into one book. … This volume is not designed as a textbook, but instead as a reference, and is extremely useful for MEMS inventors. Summing Up: Highly recommended. Graduate students, researchers/faculty, and professionals.” (N. M. Fahrenkopf, Choice, Vol. 49 (2), October, 2011)
- Table of contents (14 chapters)
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The MEMS Design Process
Pages 1-36
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Additive Processes for Semiconductors and Dielectric Materials
Pages 37-136
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Additive Processes for Metals
Pages 137-191
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Additive Processes for Polymeric Materials
Pages 193-271
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Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
Pages 273-353
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Table of contents (14 chapters)
- Download Preface 1 PDF (73.3 KB)
- Download Sample pages 1 PDF (1.2 MB)
- Download Table of contents PDF (98.1 KB)
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Bibliographic Information
- Bibliographic Information
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- Book Title
- MEMS Materials and Processes Handbook
- Editors
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- Reza Ghodssi
- Pinyen Lin
- Series Title
- MEMS Reference Shelf
- Series Volume
- 1
- Copyright
- 2011
- Publisher
- Springer US
- Copyright Holder
- Springer Science+Business Media, LLC
- eBook ISBN
- 978-0-387-47318-5
- DOI
- 10.1007/978-0-387-47318-5
- Hardcover ISBN
- 978-0-387-47316-1
- Series ISSN
- 1936-4407
- Edition Number
- 1
- Number of Pages
- XXXVI, 1188
- Number of Illustrations
- 200 b/w illustrations
- Topics
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