Editors:
- Only text that discusses and presents the theory directly related to applications and the only one that disscusses the vast applications and techniques used in FIBs and dual platform instruments
- Includes supplementary material: sn.pub/extras
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Table of contents (15 chapters)
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Front Matter
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Back Matter
About this book
Editors and Affiliations
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FEI Company, Hillsboro, USA
Lucille A. Giannuzzi
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North Carolina State University, Raleigh, USA
Fred A. Stevie
Bibliographic Information
Book Title: Introduction to Focused Ion Beams
Book Subtitle: Instrumentation, Theory, Techniques and Practice
Editors: Lucille A. Giannuzzi, Fred A. Stevie
DOI: https://doi.org/10.1007/b101190
Publisher: Springer New York, NY
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag US 2005
Hardcover ISBN: 978-0-387-23116-7Published: 19 November 2004
Softcover ISBN: 978-1-4419-3574-8Published: 29 October 2010
eBook ISBN: 978-0-387-23313-0Published: 18 May 2006
Edition Number: 1
Number of Pages: XVII, 357
Number of Illustrations: 6 b/w illustrations, 28 illustrations in colour
Topics: Condensed Matter Physics, Surfaces and Interfaces, Thin Films, Optical and Electronic Materials, Solid State Physics, Spectroscopy and Microscopy