Nato Science Series B:

Mechanisms of Reactions of Organometallic Compounds with Surfaces

Editors: Cole-Hamilton, D.J., Williams, J.O. (Eds.)

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About this book

A NATO Advanced Research Workshop on the "Mechanisms of Reactions of Organometallic Compounds with Surfaces" was held in St. Andrews, Scotland in June 1988. Many of the leading international researchers in this area were present at the workshop and all made oral presentations of their results. In addition, significant amounts of time were set aside for Round Table discussions, in which smaller groups considered the current status of mechanistic knowledge, identified areas of dispute or disagreement, and proposed experiments that need to be carried out to resolve such disputes so as to advance our understanding of this important research area. All the papers presented at the workshop are collected in this volume, together with summaries of the conclusions reached at the Round Table discussions. The workshop could not have taken place without financial support from NATO, and donations were also received from Associated Octel, Ltd., STC Ltd., and Epichem Ltd., for which the organisers are very grateful. The organisation of the meeting was greatly assisted by Mrs G. MacArthur and Mr L.R. Dunley of the Chemistry Department, St. Andrews University.

Table of contents (31 chapters)

Table of contents (31 chapters)
  • New Directions in LCVD Metallisation

    John, P.

    Pages 3-4

  • Photo-Induced Organometallic Processes in Semiconductor Surface Technology

    Haigh, J (et al.)

    Pages 5-13

  • UV Excimer Laser Induced Photochemistry of Gaseous Organometallics for Surface Modification

    Stuke, M. (et al.)

    Pages 15-22

  • Laser-Induced Photodissociation of A12(CH3)6: Gas-Phase and Adsorbed Layer Dissociation Mechanisms for A1 Film Growth

    Lubben, D. (et al.)

    Pages 23-32

  • Photonucleation and Photodeposition of A1 on Si from Flowing

    Bourree, J. E. (et al.)

    Pages 33-45

Buy this book

eBook $129.00
price for USA in USD (gross)
  • ISBN 978-1-4899-2522-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $219.99
price for USA in USD
  • ISBN 978-0-306-43205-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $149.99
price for USA in USD
  • ISBN 978-1-4899-2524-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Mechanisms of Reactions of Organometallic Compounds with Surfaces
Editors
  • D.J. Cole-Hamilton
  • J.O. Williams
Series Title
Nato Science Series B:
Series Volume
198
Copyright
1989
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4899-2522-0
DOI
10.1007/978-1-4899-2522-0
Hardcover ISBN
978-0-306-43205-7
Softcover ISBN
978-1-4899-2524-4
Series ISSN
0258-1221
Edition Number
1
Number of Pages
XIV, 300
Topics