The Physics and Chemistry of SiO2 and the Si-SiO2 Interface
Editors: Deal, B.E., Helms, C.R. (Eds.)
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- About this book
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The properties of Si02 and the Si-Si02 interface provide the key foundation onto which the majority of semiconductor device technology has been built Their study has consumed countless hours of many hundreds of investigators over the years, not only in the field of semiconductor devices but also in ceramics, materials science, metallurgy, geology, and mineralogy, to name a few. These groups seldom have contact with each other even though they often investigate quite similar aspects of the Si02 system. Desiring to facilitate an interaction between these groups we set out to organize a symposium on the Physics and Chemistry of Si()z and the Si-Si()z Interface under the auspices of The Electrochemical Society, which represents a number of the appropriate groups. This symposium was held at the 173rd Meeting of The Electrochemical Society in Atlanta, Georgia, May 15-20, 1988. These dates nearly coincided with the ten year anniversary of the "International Topical Conference on the Physics of Si02 and its Interfaces" held at mM in 1978. We have modeled the present symposium after the 1978 conference as well as its follow on at North Carolina State in 1980. Of course, much progress has been made in that ten years and the symposium has given us the opportunity to take a multidisciplinary look at that progress.
- Table of contents (60 chapters)
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Historical Perspectives of Silicon Oxidation
Pages 5-16
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Oxidation of Silicon: Tests of Mechanisms
Pages 17-23
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Silicon Oxidation Models Based on Parallel Mechanisms
Pages 25-34
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The Role of SiO in Si Oxidation at a Si-SiO2 Interface
Pages 35-42
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Uncertainty Analysis of Analytic Oxidation Models
Pages 43-51
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Table of contents (60 chapters)
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Bibliographic Information
- Bibliographic Information
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- Book Title
- The Physics and Chemistry of SiO2 and the Si-SiO2 Interface
- Editors
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- B.E. Deal
- C.R. Helms
- Copyright
- 1988
- Publisher
- Springer US
- Copyright Holder
- Springer Science+Business Media New York
- eBook ISBN
- 978-1-4899-0774-5
- DOI
- 10.1007/978-1-4899-0774-5
- Hardcover ISBN
- 978-0-306-43032-9
- Softcover ISBN
- 978-1-4899-0776-9
- Edition Number
- 1
- Number of Pages
- XIV, 556
- Topics
