About this book series

The series Microtechnology and MEMS comprises textbooks, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students.
Electronic ISSN
2365-0680
Print ISSN
1615-8326
Series Editor
  • Zhong Lin Wang,
  • Hiroyuki Fujita,
  • Jun-Bo Yoon

Book titles in this series