Sputtering by Particle Bombardment III
Characteristics of Sputtered Particles, Technical Applications
Discontinued series: although this series no longer publishes new content, the published titles listed here remain available.
Book titles in this series
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Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
- Editors:
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- R. Behrisch
- Copyright: 1983
Available Renditions
- Hard cover
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Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
- Editors:
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- R. Behrisch
- Copyright: 1981
Available Renditions
- Hard cover