Overview
- Deals with the miniaturization of electronic devices towards the nanoscale
- Presents the concept of nanolithography and nanodevices
- A reference work for researchers and engineers alike
- Includes supplementary material: sn.pub/extras
Part of the book series: NanoScience and Technology (NANO)
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Table of contents (13 chapters)
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Advanced Topics:Self-similar structures, molecular motors, nanobiosystems
Keywords
About this book
Authors and Affiliations
About the author
Gianfranco ("GF") Cerofolini (degree in Physics from the University of Milan, 1970) is visiting researcher at the University of Milano-Bicocca. His major interests are addressed to the physical limits of miniaturization and to the 'emergence' of higher-level phenomena from the underlying lower-level substrate (measurement in quantum mechanics, life in biological systems, etc.).
Although his research activity has been carried out in the industry (vacuum: SAES Getters; telecommunication: Telettra; chemistry and energetics: ENI; integrated circuits: STMicroelectronics), he has had frequent collaborations with academic centers (University of Lublin, IMEC, Stanford University, City College of New York, several Italian Universities), has been lecturer in a few Universities (Pisa, Modena, and Polytechnic of Milan), and currently is lecturer at the University of Milano-Bicocca.
His research has covered several areas: adsorption, biophysics, CMOS processing (oxidation, diffusion, ion implantation, gettering), electronic and optical materials, theory of acidity, and nanoelectronics.
A gettering technique of widespread use in microelectronics, the complete setting of ST's first silicon-gate CMOS process, the development of a process for low-fluence SOI, and the identification of a strategy for molecular electronics via a conservative extension of the existing microelectronic technology, are among his major industrial achievements. His main scientific results range from the preparation and characterization of ideal silicon p-n junctions and the discovery of a mechanism therein of pure generation without recombination, to the theoretical description of layer-by-layer oxidation at room temperature of silicon, and to the development of original mathematical techniques for the description of adsorption on heterogeneous or soft surfaces.
The results of his activity have been published in approximately 300 articles, chapters to books, and encyclopaedic items, and in a score of patents.
Bibliographic Information
Book Title: Nanoscale Devices
Book Subtitle: Fabrication, Functionalization, and Accessibility from the Macroscopic World
Authors: Gianfranco Cerofolini
Series Title: NanoScience and Technology
DOI: https://doi.org/10.1007/978-3-540-92732-7
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2009
Hardcover ISBN: 978-3-540-92731-0Published: 07 September 2009
Softcover ISBN: 978-3-642-26023-0Published: 14 March 2012
eBook ISBN: 978-3-540-92732-7Published: 26 August 2009
Series ISSN: 1434-4904
Series E-ISSN: 2197-7127
Edition Number: 1
Number of Pages: XVI, 205
Number of Illustrations: 30 b/w illustrations, 54 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Nanotechnology, Condensed Matter Physics, Engineering, general