Overview
- Provides a clear description following the order of processing: from solution to device via film formation
- Includes a detailed table of contents to help the reader to refer to the content easily in practical situations
- Gives detailed explanations of analysis equipment and equations
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Table of contents (19 chapters)
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Front Matter
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Introduction to Liquid Process
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Front Matter
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Silicon-Based Materials
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Front Matter
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Oxide-Based Materials
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Front Matter
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Keywords
About this book
This book summarizes the results of the research on how to make small electronic devices with high properties by using simple liquid processes such as coating, self-assembling and printing, especially focusing on devices composed of silicon and oxide materials. It describes syntheses and analyses of solution materials, formations of solid thin films from solutions, newly developed patterning methods to make devices, and characterization of the developed devices.
In the first part of the book, the research on liquid silicon (Si) materials is described. Because the use of a liquid material is a quite new idea for Si devices, this book is the first one to describe liquid Si materials for electronic devices. Si devices as typified by MOS-FET have been produced by using solid and gas materials. This volume precisely describes a series of processes from material synthesis to device fabrication for those who are interested and are/will be engaged in liquid Si-related work. Inthe latter part of the book, a general method of how to make good oxide films from solutions and a new imprinting method to make nanosized patterns are introduced. For making oxide films with high quality, the designing of the solution is crucial. If a solution is designed properly, a gel material called "cluster gel" can be formed which is able to be imprinted to form nanosized patterns.
The anticipated readers of this book are researchers, engineers, and students who are interested in solution and printing processes for making devices. More generally, this book will also provide guidelines for corporate managers and executives who are responsible for making strategies for future manufacturing processes.
Authors and Affiliations
About the author
Professor, Japan Advanced Institute of Science and Technology
Member of academic society:
MRS Japan
Japan Society of Applied Physics (JSAP)
The Japanese Sol-Gel Society
Society for scientific committee:
A member of Nanoimprint Technology Study Group in JSAP
A member of Single-Nanometer Figuration and the Structure-Induced Property Study Group in JSAP
Bibliographic Information
Book Title: Nanoliquid Processes for Electronic Devices
Book Subtitle: Developments of Inorganic Functional Liquid Materials and Their Processing
Authors: Tatsuya Shimoda
DOI: https://doi.org/10.1007/978-981-13-2953-1
Publisher: Springer Singapore
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer Nature Singapore Pte Ltd. 2019
Hardcover ISBN: 978-981-13-2952-4Published: 28 February 2019
eBook ISBN: 978-981-13-2953-1Published: 05 February 2019
Edition Number: 1
Number of Pages: XVI, 590
Number of Illustrations: 172 b/w illustrations, 262 illustrations in colour
Topics: Surfaces and Interfaces, Thin Films, Physical Chemistry, Electronics and Microelectronics, Instrumentation, Semiconductors, Industrial and Production Engineering