Featuring rapid publication of important results, Microsystem Technologies examines electromechanical, materials, design, and manufacturing issues of microsystems and their components. It integrates the knowledge, experience, and capabilities of academic and industrial specialists in many fields. Moreover, it contributes to the economically and ecologically sound production of reliable, high performance MEMS and information storage and processing systems.

The journal’s coverage of MEMS/NEMS addresses sensors, actuators, and other micro/nanosystems as well as micromechatronic systems integration. Coverage of information storage systems includes magnetic recording, optical recording, and other recording devices. Lastly, under the category of processing systems, the journal explores copiers, printers, scanners, and digital cameras.

  • Examines electromechanical, materials, design, and manufacturing issues of microsystems and their components
  • Integrates the knowledge, experience, and capabilities of academic and industrial specialists in many fields
  • Contributes to the economically and ecologically sound production of reliable, high performance MEMS and information storage and processing systems
  • 95% of authors who answered a survey reported that they would definitely publish or probably publish in the journal again

Journal information

Editors-in-Chief
  • Bharat Bhushan
Editor-in-Chief
  • Bernd Michel
Publishing model
Hybrid. Learn about publishing OA with us

Journal metrics

1.737 (2019)
Impact factor
1.439 (2019)
Five year impact factor
42 days
Submission to first decision
114 days
Submission to acceptance
265,203 (2019)
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This journal has 81 open access articles

Journal updates

  • COVID-19 and impact on peer review

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About this journal

Electronic ISSN
1432-1858
Print ISSN
0946-7076
Abstracted and indexed in
  1. ACM Digital Library
  2. CNKI
  3. Chemical Abstracts Service (CAS)
  4. Current Contents/Engineering, Computing and Technology
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  9. EBSCO Discovery Service
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  11. EBSCO STM Source
  12. EI Compendex
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  14. INSPEC
  15. Institute of Scientific and Technical Information of China
  16. Japanese Science and Technology Agency (JST)
  17. Journal Citation Reports/Science Edition
  18. Naver
  19. OCLC WorldCat Discovery Service
  20. ProQuest Advanced Technologies & Aerospace Database
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  22. ProQuest SciTech Premium Collection
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  25. ProQuest-ExLibris Summon
  26. SCImago
  27. SCOPUS
  28. Science Citation Index
  29. Science Citation Index Expanded (SciSearch)
  30. TD Net Discovery Service
  31. UGC-CARE List (India)
  32. WTI Frankfurt eG
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