Featuring rapid publication of important results, Microsystem Technologies examines electromechanical, materials, design, and manufacturing issues of microsystems and their components. It integrates the knowledge, experience, and capabilities of academic and industrial specialists in many fields. Moreover, it contributes to the economically and ecologically sound production of reliable, high performance MEMS and information storage and processing systems.

The journal’s coverage of MEMS/NEMS addresses sensors, actuators, and other micro/nanosystems as well as micromechatronic systems integration. Coverage of information storage systems includes magnetic recording, optical recording, and other recording devices. Lastly, under the category of processing systems, the journal explores copiers, printers, scanners, and digital cameras.

  • Examines electromechanical, materials, design, and manufacturing issues of microsystems and their components
  • Integrates the knowledge, experience, and capabilities of academic and industrial specialists in many fields
  • Contributes to the economically and ecologically sound production of reliable, high performance MEMS and information storage and processing systems
  • 95% of authors who answered a survey reported that they would definitely publish or probably publish in the journal again

Journal information

Editors-in-Chief
  • Bharat Bhushan
Editor-in-Chief
  • Bernd Michel
Publishing model
Hybrid. Open Access options available

Journal metrics

1.513 (2018)
Impact factor
1.288 (2018)
Five year impact factor
42 days
Submission to first decision
93 days
Submission to acceptance
265,203 (2019)
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Latest articles

  1. Authors

    • Bernd Michel
    Content type: Editorial
This journal has 78 open access articles

Journal updates

  • COVID-19 and impact on peer review

    As a result of the significant disruption that is being caused by the COVID-19 pandemic we are very aware that many researchers will have difficulty in meeting the timelines associated with our peer review process during normal times.  Please do let us know if you need additional time. Our systems will continue to remind you of the original timelines but we intend to be highly flexible at this time.

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About this journal

Electronic ISSN
1432-1858
Print ISSN
0946-7076
Abstracted and indexed in
  1. ACM Digital Library
  2. CNKI
  3. Chemical Abstracts Service (CAS)
  4. Current Contents/Engineering, Computing and Technology
  5. EBSCO Academic Search
  6. EBSCO Applied Science & Technology Source
  7. EBSCO Computers & Applied Sciences Complete
  8. EBSCO Discovery Service
  9. EBSCO Engineering Source
  10. EBSCO STM Source
  11. EI Compendex
  12. Gale
  13. Gale Academic OneFile
  14. Google Scholar
  15. INSPEC
  16. Institute of Scientific and Technical Information of China
  17. Japanese Science and Technology Agency (JST)
  18. Journal Citation Reports/Science Edition
  19. Naver
  20. OCLC WorldCat Discovery Service
  21. ProQuest Advanced Technologies & Aerospace Database
  22. ProQuest Central
  23. ProQuest SciTech Premium Collection
  24. ProQuest Technology Collection
  25. ProQuest-ExLibris Primo
  26. ProQuest-ExLibris Summon
  27. SCImago
  28. SCOPUS
  29. Science Citation Index
  30. Science Citation Index Expanded (SciSearch)
  31. WTI Frankfurt eG
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