MRS Advances - MRS Advances issue on 23rd International Conference on Ion Implantation Technology
23rd International Conference on Ion Implantation Technology (IIT 2022)
IIT 2022 was held on September 25-29, 2022, at the US Grant Hotel in San Diego, CA, after a two-year delay due to the COVID-19 pandemic. Approximately 180 attendees enjoyed an exciting week of technical presentations and social activities. This conference series is the premier world meeting for discussion of the major challenges in current and emerging technologies related to implant/doping and annealing processes, device applications, equipment, metrology and modeling.
The Technical Program took place in the Presidential Ballroom and consisted of three plenary talks, 11 invited talks, 35 oral contributed talks, and 43 posters presented in two sessions. These presentations covered a wide range of topics including Advanced Implant/Doping and Annealing Equipment, Annealing Technologies and Processes, Device Applications for Implant/Doping and Annealing Processes, Implant/Doping Technologies and Processes, Metrologies for Implant/Doping and Annealing Processes, and Modeling and Simulation of Implant/Doping and Annealing Processes. Full-length papers for the technical presentations are published in a Special Issue of MRS Advances on Ion Implantation. Click here (this opens in a new tab) to access the issue. The Technical Program Co-Chairs were Susan Felch (Susan Felch Consulting) and Larry Larson (Texas State University), the Annealing Program Chair was Wilfried Lerch (SkyLark Solutions), and the Proceedings Chair was Larry Larson (Texas State University).
The Conference, as is the custom of IIT, was preceded by a School featuring Ion Implantation Science and Technology (with Annealing). The IIT School took place on September 22-24, 2022, in the US Grant Hotel. About 55 attendees learned the fundamental and practical aspects of ion implantation and annealing operations in research and IC production environments, from a team of 12 instructors. The School was coordinated by the organizational efforts of Michael Current and Jim Ziegler.
A strong Social Program enabled participants to sample the history and culture of the San Diego area. The Program began with a Welcome Reception on Sunday evening, continued with an excursion on Wednesday afternoon, and culminated with a banquet in the historic Bivouac Ballroom in the US Grant Hotel on Wednesday night. The excursion choices ranged from a catamaran cruise around San Diego harbor to a bike tour of Coronado Island and an urban brewery tour and tasting. In addition, partners of conference attendees enjoyed a casual program, including a visit to the gardens of Balboa Park.
The high level of sponsorships received from the worldwide semiconductor industry was essential to the success of IIT 2022. The Conference had two Silver Sponsors (Entegris and Plansee) and 10 Bronze Sponsors. The strong participation in the Trade Exhibition was another key contribution to the Conference. Thirteen Exhibits featured ion implantation and annealing equipment and services in the Presidential Ballroom of the US Grant Hotel throughout the week. Aaron Vanderpool (Sponsorships Chair, Intel) and Paul Graller and Jennifer Ibe of Hall-Erickson, Inc. recruited sponsors and exhibitors.
The Conference Co-Chair was Susan Felch (Susan Felch Consulting). The other Conference Co-Chair, Mitch Taylor, sadly left us before the conference could take place. When Mitch passed away on November 27, 2020, he was only 60 years old and still had many plans to contribute to the ion implantation technical community, including chairing IIT 2022. Highlights of his career include Ion Implant Group Leader at Intel for two decades, Vice President & General Manager of the Applied Materials Implant Division for two years, and then Senior Director of Solar Factory Projects, also at Applied Materials. However, most importantly, Mitch was known as an incredibly caring person who always put others before himself, as a mentor to dozens of co-workers and coach of youth sports teams.
A plenary talk was devoted to additional International Committee Members who passed away during the long interval between Conferences. These include: Hans Glawischnig who was a pioneering leader in ion implantation at Siemens, a founding leader for the IIET/IIT conferences, and co-chair of the IIET82 and IIT2000 Conferences; Josef Gyulai, a longtime professor in Budapest and a pioneer of RBS analysis, chair of the “Symposium on Ion Implantation of Socialist Countries” in 1974, and a leader of many global conferences including Ion Beam Modification of Materials (1978), Ion Beam Analysis (1993) and IIT-2000; and Ken Purser, who did early work at High Voltage Engineering (with Robert Van de Graaff), founded General Ionex (Newburyport MA), and developed the use of tandem accelerators for ion beam analysis (RBS), atomic mass spectroscopy (AMS), and early MeV dopant implanters.
We would like to thank the Materials Research Society (MRS) Conference Services team (Brooke Baker, Marla Boots, and Beth Powell) for their tremendous organizational, administrative, and on-site support over the unexpectedly-long, four years. Finally, we would like to thank most of all the conference participants, organizers, invited speakers and authors, for making IIT 2022 such a rewarding and memorable event.
We now look forward to IIT 2024, the 24th conference in this series, which will be held in Toyama, Japan in late September 2024. This conference will be chaired by Hitoshi Wakabyashi (Tokyo Institute of Technology) with assistance from Nariaki Hamamoto (Nissin Ion Equipment), Takashi Kuroi (Nissin Ion Equipment), Yoji Kawasaki (SMIT), and Jiro Matsuo (Kyoto University).
Click here (this opens in a new tab) to access the special issue!
Larry Larson
Susan Felch
Committees
Conference Chair
We commemorate Mitch Taylor (this opens in a new tab), who left us before the conference could take place.
Conference Co-Chair
Susan Felch, Susan Felch Consulting
Technical Program Co-Chairs
Susan Felch, Susan Felch Consulting
Larry Larson, Texas State University
Sponsorships Chair
Aaron Vanderpool, Intel Corporation
Annealing Program Chair
Wilfried Lerch, SkyLark Solutions
Proceedings Chair
Larry Larson, Texas State University
Technical Program Committee
Co-Chairs: Susan Felch, Susan Felch Consulting, Larry Larson, Texas State University
Shaoyin Chen, Ultratech/Veeco
Paul Chu, City University of Hong Kong
Alain Claverie, Centre d’Élaboration des Matériaux et d’Etudes Structurales (CEMES-CNRS)
Michael Current, Current Scientific
Ray Duffy, Tyndall National Institute
Volker Häublein, Fraunhofer IISB
Kevin Jones, University of Florida
Fareen Khaja, Veeco
Wilfried Lerch, SkyLark Solutions
Jiro Matsuo, Kyoto University
Victor Moroz, Synopsys
Juergen Niess, HQ-Dielectrics GmbH
Deven Raj, Applied Materials, Inc.
Leonard Rubin, Axcelis Technologies
Werner Schustereder, Infineon Technologies
Ed Seebauer, University of Illinois at Urbana-Champaign
Kyoichi Suguro, Sugsol Corporation
Paul Timans, Thermal Process Solutions Ltd.
Frank Torregrosa, Ion Beam Services
Wilfried Vandervorst, imec
International Committee
Chair: Kevin Jones, University of Florida, USA
David Chen, Advanced Ion Beam Technology, Inc, Taiwan
John Chen, Kingstone Semiconductor, China
Paul Chu, City University of Hong Kong, Hong Kong
Michael Current, Current Scientific, USA
Susan Felch, Susan Felch Consulting, USA
Nariaki Hamamoto, Nissin Ion Equipment Co., Ltd., Japan
Volker Häublein, Fraunhofer IISB, Germany
Amitabh Jain, Leonardo DRS, USA
Masataka Kase, Socionext, Japan
Yoji Kawasaki, Sumitomo Heavy Industries Ion Technology Co., Ltd., Japan
Larry Larson, Texas State University, USA
Wen-Hsi Lee, National Cheng Kung University, Taiwan
Jiro Matsuo, Kyoto University, Japan
Dirk Mous, High Voltage Engineering Europa BV, Netherlands
Lourdes Pelaz, University of Valladolid, Spain
Deven Raj, Applied Materials, Inc.
Leonard Rubin, Axcelis Technologies, USA
Geoffrey Ryding, Neutron Therapeutics, USA
Heiner Ryssel, Fraunhofer IISB, Germany
Werner Schustereder, Infineon Technologies, Austria
Mikio Takai, Osaka University (emeritus), Japan
Aaron Vanderpool, Intel Corporation, USA
Anatoli Vyatkin, Russian Academy of Sciences, Russia
Andrew Wittkower, (retired) USA
Isao Yamada, Kyoto University (emeritus), Japan
James Ziegler, U.S. Naval Academy (retired), USA
Silver Sponsors
Entegris
Plansee
Bronze Sponsors
Advanced Ion Beam Technology, Inc.
Applied Materials Inc.
Axcelis Technologies, Inc.
Coherent
iON Technology Solutions
Keystone Semiconductor
Mattson Technology
Nissin Ion Equipment Co., Ltd.
NuMat Technologies
Sumitomo Heavy Industries Ion Technology Co., Ltd.