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Volume 22, Issue 10

October 1997

Low-Dielectric-Constant Materials

23 articles in this issue

The Recent Revolution in High Performance Computing
Horst D. Simon
Departments 01 October 1997 Pages: 5 - 6
Research/Researchers

Department 01 October 1997 Pages: 8 - 13
Washington News

Department 01 October 1997 Pages: 14 - 14
MRS Helps Grad Students Dodge Tax Bullet
Julia M. Phillips
Department 01 October 1997 Pages: 16 - 16
Resources

Department 01 October 1997 Pages: 17 - 17
Editor’s Choice

Department 01 October 1997 Pages: 18 - 18
Low-Dielectric-Constant Materials for ULSI Interlayer-Dielectric Applications
Wei William Lee
Paul S. Ho
Low-Dielectric-Constant Materials 01 October 1997 Pages: 19 - 27
Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films
T. M. Lu
J. A. Moore
Low-Dielectricconstant Materials 01 October 1997 Pages: 28 - 31
Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant Applications
Nigel P. Hacker
Low-Dielectricconstant Materials 01 October 1997 Pages: 33 - 38
Nanoporous Silica as an Ultralow-k Dielectric
Changming Jin
J. D. Luttmer
Teresa A. Ramos
Low-Dielectricconstant Materials 01 October 1997 Pages: 39 - 42
Phase-Separated Inorganic-Organic Hybrids for Microelectronic Applications
R. D. Miller
J. L. Hedrick
J. P. Hummel
Low-Dielectricconstant Materials 01 October 1997 Pages: 44 - 48
Materials Issues and Characterization of Low-k Dielectric Materials
E. Todd Ryan
Andrew J. McKerrow
Paul S. Ho
Low-Dielectricconstant Materials 01 October 1997 Pages: 49 - 54
Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric
Kazuhiko Endo
Low-Dielectricconstant Materials 01 October 1997 Pages: 55 - 58
Integration of Low-k Dielectric Materials Into Sub-0.25-μm Interconnects
R. Scott List
Abha Singh
Girish Dixit
Low-Dielectricconstant Materials 01 October 1997 Pages: 61 - 69
Advertisers in This Issue

Department 01 October 1997 Pages: 70 - 71
1997 MRS Fall Meeting Preview
Harry A. Atwater
Dean W. Face
A. Lindsay Greer
Department 01 October 1997 Pages: 72 - 77
1997 Von Hippel Award Goes to Gabor A. Somorjai for Broad Contributions to Surface Science
Gabor A. Somorjai
MRS News 01 October 1997 Pages: 79 - 80
Merton C. Flemings Selected for 1997 David Turnbull Lectureship for Contributions to Solidification Processing
Merton C. Flemings
MRS News 01 October 1997 Pages: 80 - 80
Shuji Nakamura Named 1997 MRS Medalist
Shuji Nakamura
MRS News 01 October 1997 Pages: 81 - 81
Plenary Speaker Harry Y. McSween Jr. to Address Materials Findings of the Mars Pathfinder
Harry Y. McSween Jr.
MRS News 01 October 1997 Pages: 81 - 92
Materials Scientist Utilizes High-Tech Knowledge for Business Projects
Darius Sankey
Department 01 October 1997 Pages: 93 - 93
The Electron Celebrates the 100th Anniversary of Its Discovery

Department 01 October 1997 Pages: 94 - 94
Abstracts for December 1997 Journal of Materials Research

Abstracts 01 October 1997 Pages: 95 - 100

Volume 22, Issue 10

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