Call for Papers

Special Issue on “Atomic and Close-to-atomic Scale Metrology”

Guest Editors

Dr. Gaoliang Dai, Physikalisch-Technische Bundesanstalt, Germany, gaoliang.dai@ptb.de
Dr. Daesung Park, Physikalisch-Technische Bundesanstalt, Germany,  daesung.park@ptb.de
Dr. Ndubuisi George Orji, National Institute of Standards and Technology, U.S.A., ndubuisi.orji@nist.gov 

Scope of this special issue

Papers in all areas of nanometrology, particularly the metrology technologies for atomic and close-to-atomic scale measurements (ACSM) will be considered, including but not limited to:

  • High-Resolution Transmission Electron Microscopy (HR-TEM) 
  • High-Resolution Scanning Transmission Electron Microscopy (HR-STEM)
  • Energy Dispersive X-ray (EDX) and Electron Energy Loss (EEL) spectroscopy
  • Electron Tomography 
  • Atom Probe Tomography (APT)
  • Scanning Electron Microscopy (SEM) and Transmission Scanning Electron Microscopy (TSEM)
  • Various Scanning Probe Microscopic (SPM) technologies
  • X-Ray based nanometrology 
  • Optical scatterometry
  • Hybrid metrology
  • Ultraprecision positioning and metrology Technologies
  • Standards and calibration 
  • Modelling and simulation 
  • Application examples of ACSM in challenging industrial applications
  • Other emerging and potentially disruptive technologies for nanometrology

Original research papers, review articles and short communications are all welcome.

All manuscripts must be submitted through the manuscripts system at:

https://www.editorialmanager.com/nmme/default.aspx

Submission Deadline: 15 September 2021

Publication Date: December 2021