Call for Papers

Special Issue on “Atomic and Close-to-atomic Scale Metrology”

Guest Editors

Dr. Gaoliang Dai, Physikalisch-Technische Bundesanstalt, Germany,
Dr. Daesung Park, Physikalisch-Technische Bundesanstalt, Germany,
Dr. Ndubuisi George Orji, National Institute of Standards and Technology, U.S.A., 

Scope of this special issue

Papers in all areas of nanometrology, particularly the metrology technologies for atomic and close-to-atomic scale measurements (ACSM) will be considered, including but not limited to:

  • High-Resolution Transmission Electron Microscopy (HR-TEM) 
  • High-Resolution Scanning Transmission Electron Microscopy (HR-STEM)
  • Energy Dispersive X-ray (EDX) and Electron Energy Loss (EEL) spectroscopy
  • Electron Tomography 
  • Atom Probe Tomography (APT)
  • Scanning Electron Microscopy (SEM) and Transmission Scanning Electron Microscopy (TSEM)
  • Various Scanning Probe Microscopic (SPM) technologies
  • X-Ray based nanometrology 
  • Optical scatterometry
  • Hybrid metrology
  • Ultraprecision positioning and metrology Technologies
  • Standards and calibration 
  • Modelling and simulation 
  • Application examples of ACSM in challenging industrial applications
  • Other emerging and potentially disruptive technologies for nanometrology

Original research papers, review articles and short communications are all welcome.

All manuscripts must be submitted through the manuscripts system at:

Submission Deadline: 15 September 2021

Publication Date: December 2021