Nanoliquid Processes for Electronic Devices

Developments of Inorganic Functional Liquid Materials and Their Processing

Authors: Shimoda, Tatsuya

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  • Provides a clear description following the order of processing: from solution to device via film formation 
  • Includes a detailed table of contents to help the reader to refer to the content easily in practical situations 
  • Gives detailed explanations of analysis equipment and equations
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eBook 130,89 €
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  • ISBN 978-981-13-2953-1
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Hardcover 166,39 €
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  • ISBN 978-981-13-2952-4
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About this book

This book summarizes the results of the research on how to make small electronic devices with high properties by using simple liquid processes such as coating, self-assembling and printing, especially focusing on devices composed of silicon and oxide materials. It describes syntheses and analyses of solution materials, formations of solid thin films from solutions, newly developed patterning methods to make devices, and characterization of the developed devices. 

In the first part of the book, the research on liquid silicon (Si) materials is described. Because the use of a liquid material is a quite new idea for Si devices, this book is the first one to describe liquid Si materials for electronic devices. Si devices as typified by MOS-FET have been produced by using solid and gas materials. This volume precisely describes a series of processes from material synthesis to device fabrication for those who are interested and are/will be engaged in liquid Si-related work. In the latter part of the book, a general method of how to make good oxide films from solutions and a new imprinting method to make nanosized patterns are introduced. For making oxide films with high quality, the designing of the solution is crucial. If a solution is designed properly, a gel material called "cluster gel" can be formed which is able to be imprinted to form nanosized patterns.

The anticipated readers of this book are researchers, engineers, and students who are interested in solution and printing processes for making devices. More generally, this book will also provide guidelines for corporate managers and executives who are responsible for making strategies for future manufacturing processes.






About the authors

Tatsuya Shimoda
Professor, Japan Advanced Institute of Science and Technology 

Member of academic society:
                MRS Japan
                Japan Society of Applied Physics (JSAP)
                The Japanese Sol-Gel Society

Society for scientific committee:
                A member of Nanoimprint Technology Study Group in JSAP
                A member of Single-Nanometer Figuration and the Structure-Induced Property Study Group in JSAP

Table of contents (19 chapters)

Table of contents (19 chapters)

Buy this book

eBook 130,89 €
price for Spain (gross)
  • ISBN 978-981-13-2953-1
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 166,39 €
price for Spain (gross)
  • ISBN 978-981-13-2952-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Nanoliquid Processes for Electronic Devices
Book Subtitle
Developments of Inorganic Functional Liquid Materials and Their Processing
Authors
Copyright
2019
Publisher
Springer Singapore
Copyright Holder
Springer Nature Singapore Pte Ltd.
eBook ISBN
978-981-13-2953-1
DOI
10.1007/978-981-13-2953-1
Hardcover ISBN
978-981-13-2952-4
Edition Number
1
Number of Pages
XVI, 590
Number of Illustrations
172 b/w illustrations, 262 illustrations in colour
Topics