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3-Dimensional Process Simulation

Editors: Lorenz, J. (Ed.)

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eBook 71,68 €
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  • ISBN 978-3-7091-6905-6
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About this book

Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three-dimensional device simulation, and challenged by the great algorithmic problems caused by moving interfaces and by the requirement to limit computation times and memory requirements. A workshop (Erlangen, September 5, 1995) provided a forum to discuss the industrial needs, technical problems, and solutions being developed in the field of three-dimensional semiconductor process simulation. Invited presentations from leading semiconductor companies and research Centers of Excellence from Japan, the USA, and Europe outlined novel numerical algorithms, physical models, and applications in this rapidly emerging field.

Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook 71,68 €
price for Spain (gross)
  • ISBN 978-3-7091-6905-6
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover 90,47 €
price for Spain (gross)
  • ISBN 978-3-7091-7430-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
3-Dimensional Process Simulation
Editors
  • J. Lorenz
Copyright
1995
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag/Wien
eBook ISBN
978-3-7091-6905-6
DOI
10.1007/978-3-7091-6905-6
Softcover ISBN
978-3-7091-7430-2
Edition Number
1
Number of Pages
VIII, 196
Topics