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Nanofabrication

Techniques and Principles

Editors: Stepanova, Maria, Dew, Steven (Eds.)

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  • Covers a wide range of emerging nanofabrication techniques
  • Includes approximately 200 figures and tables to explain the topic
  • Content provided by leading researchers in the field
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eBook 117,69 €
price for Spain (gross)
  • ISBN 978-3-7091-0424-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 176,79 €
price for Spain (gross)
  • ISBN 978-3-7091-0423-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 155,50 €
price for Spain (gross)
  • ISBN 978-3-7091-1666-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
About this book

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Table of contents (13 chapters)

Table of contents (13 chapters)

Buy this book

eBook 117,69 €
price for Spain (gross)
  • ISBN 978-3-7091-0424-8
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 176,79 €
price for Spain (gross)
  • ISBN 978-3-7091-0423-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 155,50 €
price for Spain (gross)
  • ISBN 978-3-7091-1666-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Nanofabrication
Book Subtitle
Techniques and Principles
Editors
  • Maria Stepanova
  • Steven Dew
Copyright
2012
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag/Wien
eBook ISBN
978-3-7091-0424-8
DOI
10.1007/978-3-7091-0424-8
Hardcover ISBN
978-3-7091-0423-1
Softcover ISBN
978-3-7091-1666-1
Edition Number
1
Number of Pages
VIII, 344
Topics