Ion Implantation in Diamond, Graphite and Related Materials

1. Front Matter

   Pages I-IX

   PDF

2. Introduction

   • M. S. Dresselhaus, R. Kalish

   Pages 1-2

3. Carbon Materials: Graphite, Diamond and Others

   • M. S. Dresselhaus, R. Kalish

   Pages 3-25

4. Ion Implantation

   • M. S. Dresselhaus, R. Kalish

   Pages 26-37

5. Ion Beam Analysis Techniques

   • M. S. Dresselhaus, R. Kalish

   Pages 38-58

6. Other Characterization Techniques

   • M. S. Dresselhaus, R. Kalish

   Pages 59-77

7. Implantation-Induced Modifications to Graphite

   • M. S. Dresselhaus, R. Kalish

   Pages 78-114

8. Implantation-Induced Modifications to Graphite-Related Materials

   • M. S. Dresselhaus, R. Kalish

   Pages 115-128

9. Implantation-Induced Modifications to Diamond

   • M. S. Dresselhaus, R. Kalish

   Pages 129-158

10. Implantation-Induced Modifications to Diamond-Related Materials

    • M. S. Dresselhaus, R. Kalish

    Pages 159-174

11. Concluding Remarks

    • M. S. Dresselhaus, R. Kalish

    Pages 175-176

12. Back Matter

    Pages 177-202

    PDF

Carbon has always been a unique and intriguing material from a funda­ mental standpoint and, at the same time, a material with many technological uses. Carbon-based materials, diamond, graphite and their many deriva­ tives, have attracted much attention in recent years for many reasons. Ion implantation, which has proven to be most useful in modifying the near­ surface properties of many kinds of materials, in particular semiconductors, has also been applied to carbon-based materials. This has yielded, mainly in the last decade, many scientifically interesting and technologically impor­ tant results. Reports on these studies have been published in a wide variety of journals and topical conferences, which often have little disciplinary overlap, and which often address very different audiences. The need for a review to cover in an integrated way the various diverse aspects of the field has become increasingly obvious. Such a review should allow the reader to get an overview of the research that has been done thus far, to gain an ap­ preciation of the common features in the response of the various carbon to ion impact, and to become aware of current research oppor­ allotropes tunities and unresolved questions waiting to be addressed. Realizing this, and having ourselves both contributed to the field, we decided to write a review paper summarizing the experimental and theoretical status of ion­ implantation into diamond, graphite and related materials.

• Ion implantation
• Mössbauer spectroscopy
• Plantation
• X-ray
• annealing
• carbon
• diamond
• electron
• glass
• graphite
• hydrogen
• mechanical property
• polymer
• scattering
• spectroscopy

• Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, USA

  M. S. Dresselhaus

• Solid State Institute and Physics Department, Technion—Israel Institute of Technology, Haifa, Israel

  R. Kalish

Policies and ethics