Skip to main content
SpringerLink
Log in

Rare-Earth Implanted MOS Devices for Silicon Photonics

Microstructural, Electrical and Optoelectronic Properties

  • Book
  • © 2010

Overview

Authors:
  1. Lars Rebohle

    1. Dresden-Rossendorf e. V., Inst. Ionenstrahlphysik und, Forschungszentrum, Dresden, Germany

    View author publications

    You can also search for this author in PubMed   Google Scholar

  2. Wolfgang Skorupa

    1. Dresden-Rossendorf e. V., Inst. Ionenstrahlphysik und, Forschungszentrum, Dresden, Germany

    View author publications

    You can also search for this author in PubMed   Google Scholar

  • Summarizes the current knowledge in implanted rare earth materials
  • Includes structural microelectric device aspects
  • A reference work for researchers and engineers alike
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 142)

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 99.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 129.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 129.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (7 chapters)

  1. Front Matter

    Pages i-xviii
    Download chapter PDF

  2. Silicon-Based Light Emission

    • Lars Rebohle, Wolfgang Skorupa
    Pages 1-4

  3. Microstructure

    • Lars Rebohle, Wolfgang Skorupa
    Pages 5-21

  4. Electrical Properties

    • Lars Rebohle, Wolfgang Skorupa
    Pages 23-52

  5. Electroluminescence Spectra

    • Lars Rebohle, Wolfgang Skorupa
    Pages 53-83

  6. Electroluminescence Efficiency

    • Lars Rebohle, Wolfgang Skorupa
    Pages 85-116

  7. Stability and Degradation

    • Lars Rebohle, Wolfgang Skorupa
    Pages 117-145

  8. Applications

    • Lars Rebohle, Wolfgang Skorupa
    Pages 147-157

  9. Back Matter

    Pages 159-173
    Download chapter PDF
Back to top

Keywords

About this book

The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general.

Authors and Affiliations

  • Dresden-Rossendorf e. V., Inst. Ionenstrahlphysik und, Forschungszentrum, Dresden, Germany

    Lars Rebohle, Wolfgang Skorupa

Bibliographic Information

  • Book Title: Rare-Earth Implanted MOS Devices for Silicon Photonics

  • Book Subtitle: Microstructural, Electrical and Optoelectronic Properties

  • Authors: Lars Rebohle, Wolfgang Skorupa

  • Series Title: Springer Series in Materials Science

  • DOI: https://doi.org/10.1007/978-3-642-14447-9

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)

  • Copyright Information: Springer-Verlag Berlin Heidelberg 2010

  • Hardcover ISBN: 978-3-642-14446-2Published: 21 October 2010

  • Softcover ISBN: 978-3-642-26558-7Published: 01 December 2012

  • eBook ISBN: 978-3-642-14447-9Published: 20 October 2010

  • Series ISSN: 0933-033X

  • Series E-ISSN: 2196-2812

  • Edition Number: 1

  • Number of Pages: XVIII, 174

  • Number of Illustrations: 117 b/w illustrations, 3 illustrations in colour

  • Topics: Optical and Electronic Materials

Publish with us

Policies and ethics

Back to top

Search

Navigation