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Ultraclean Surface Processing of Silicon Wafers

Secrets of VLSI Manufacturing

Editors: Hattori, Takeshi (Ed.)

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eBook 272,51 €
price for Spain (gross)
  • ISBN 978-3-662-03535-1
  • Digitally watermarked, DRM-free
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  • Immediate eBook download after purchase
Hardcover 343,19 €
price for Spain (gross)
  • ISBN 978-3-540-61672-6
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  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 340,17 €
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  • ISBN 978-3-642-08272-6
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  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
About this book

The contamination of wafer surfaces with particles arising from the processing equipment is the main reason for yield losses in the manufacturing of VLSI devices. The starting point for the control of contamination must be the surface of the wafer itself and not just the reduction of contamination in the ambient air or in the gases, chemicals and water used for production. A totally new concept for clean surface processing is introduced here. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic, as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

Table of contents (46 chapters)

Table of contents (46 chapters)

Buy this book

eBook 272,51 €
price for Spain (gross)
  • ISBN 978-3-662-03535-1
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 343,19 €
price for Spain (gross)
  • ISBN 978-3-540-61672-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 340,17 €
price for Spain (gross)
  • ISBN 978-3-642-08272-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Ultraclean Surface Processing of Silicon Wafers
Book Subtitle
Secrets of VLSI Manufacturing
Editors
  • Takeshi Hattori
Translated by
Hattori, T., Heusler, S., Webb, J.P.
Copyright
1998
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
Distribution Rights
Distribution rights for Japan: Realize Inc., Tokyo, Japan
eBook ISBN
978-3-662-03535-1
DOI
10.1007/978-3-662-03535-1
Hardcover ISBN
978-3-540-61672-6
Softcover ISBN
978-3-642-08272-6
Edition Number
1
Number of Pages
XXVIII, 616
Additional Information
Original Japanese edition published by Realize Inc., 1995
Topics