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Microtechnology and MEMS

Micromachines as Tools for Nanotechnology

Editors: Fujita, Hiroyuki (Ed.)

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  • ISBN 978-3-642-55503-9
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About this book

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.

Table of contents (8 chapters)

Table of contents (8 chapters)

Buy this book

eBook 117,69 €
price for Spain (gross)
  • ISBN 978-3-642-55503-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 165,21 €
price for Spain (gross)
  • ISBN 978-3-540-00856-9
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 155,99 €
price for Spain (gross)
  • ISBN 978-3-642-62465-0
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Micromachines as Tools for Nanotechnology
Editors
  • Hiroyuki Fujita
Series Title
Microtechnology and MEMS
Copyright
2003
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag Berlin Heidelberg
eBook ISBN
978-3-642-55503-9
DOI
10.1007/978-3-642-55503-9
Hardcover ISBN
978-3-540-00856-9
Softcover ISBN
978-3-642-62465-0
Series ISSN
1615-8326
Edition Number
1
Number of Pages
XII, 211
Topics

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