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Computational Microelectronics

Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

Authors: Pichler, Peter

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About this book

Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in silicon, as well as of their complexes. Special emphasis is placed on compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behavior from experimental and theoretical investigations. In addition, the book discusses the fundamental concepts of silicon and its defects, the electron system, diffusion, thermodynamics, and reaction kinetics which form the scientific basis needed for a thorough understanding of the text. Therefore, the book is able to provide an introduction to newcomers in this field up to a comprehensive reference for experts in process technology, solid-state physics, and simulation of semiconductor processes.

Table of contents (7 chapters)

Table of contents (7 chapters)

Buy this book

eBook 212,93 €
price for Spain (gross)
  • ISBN 978-3-7091-0597-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 291,19 €
price for Spain (gross)
  • ISBN 978-3-211-20687-4
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 272,14 €
price for Spain (gross)
  • ISBN 978-3-7091-7204-9
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon
Authors
Series Title
Computational Microelectronics
Copyright
2004
Publisher
Springer-Verlag Wien
Copyright Holder
Springer-Verlag Wien
eBook ISBN
978-3-7091-0597-9
DOI
10.1007/978-3-7091-0597-9
Hardcover ISBN
978-3-211-20687-4
Softcover ISBN
978-3-7091-7204-9
Series ISSN
0179-0307
Edition Number
1
Number of Pages
XXI, 554
Number of Illustrations
40 b/w illustrations
Topics

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