DIY MEMS

Fabricating Microelectromechanical Systems in Open Use Labs

Authors: Munro, Deborah

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  • Introduces the MEMS fabrication processes and equipment
  • Explains how to take the first steps - where to start and get initial advice and further assistance
  • Includes a global list of MEMS facilities and resources with contact information
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  • ISBN 978-3-030-33073-6
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
Hardcover n/a
  • ISBN 978-3-030-33072-9
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About this book

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. 

About the authors

Dr. Deborah Munro is a Senior Lecturer in the bioengineering track within the mechanical engineering department at the University of Canterbury, Christchurch, and has more than 30 years of experience in mechanical and biomedical engineering. She earned her bachelor’s degree in mechanical engineering from the University of the Pacific, her master’s degree in mechanical engineering from Stanford University, and her doctorate in biological systems engineering from the University of California at Davis. 

Table of contents (20 chapters)

Table of contents (20 chapters)
  • Introduction

    Pages 1-9

    Munro, Deborah

  • NNCI

    Pages 11-19

    Munro, Deborah

  • Working in a Cleanroom

    Pages 21-30

    Munro, Deborah

  • MEMS Fabrication Process

    Pages 31-47

    Munro, Deborah

  • Equipment

    Pages 49-55

    Munro, Deborah

Buy this book

eBook n/a
  • ISBN 978-3-030-33073-6
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
Hardcover n/a
  • ISBN 978-3-030-33072-9
  • Free shipping for individuals worldwide
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Bibliographic Information

Bibliographic Information
Book Title
DIY MEMS
Book Subtitle
Fabricating Microelectromechanical Systems in Open Use Labs
Authors
Copyright
2019
Publisher
Springer International Publishing
Copyright Holder
Springer Nature Switzerland AG
eBook ISBN
978-3-030-33073-6
DOI
10.1007/978-3-030-33073-6
Hardcover ISBN
978-3-030-33072-9
Edition Number
1
Number of Pages
XVI, 188
Number of Illustrations
15 b/w illustrations, 4 illustrations in colour
Topics