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DIY MEMS

Fabricating Microelectromechanical Systems in Open Use Labs

  • Book
  • © 2019

Overview

Authors:
  1. Deborah Munro

    1. College of Engineering, University of Canterbury, Christchurch, New Zealand

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  • Introduces the MEMS fabrication processes and equipment
  • Explains how to take the first steps - where to start and get initial advice and further assistance
  • Includes a global list of MEMS facilities and resources with contact information

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Table of contents (20 chapters)

  1. Front Matter

    Pages i-xvi
    Download chapter PDF

  2. Introduction

    • Deborah Munro
    Pages 1-9

  3. NNCI

    • Deborah Munro
    Pages 11-19

  4. Working in a Cleanroom

    • Deborah Munro
    Pages 21-30

  5. MEMS Fabrication Process

    • Deborah Munro
    Pages 31-47

  6. Equipment

    • Deborah Munro
    Pages 49-55

  7. Tools and Supplies

    • Deborah Munro
    Pages 57-65

  8. Designing for MEMS

    • Deborah Munro
    Pages 67-74

  9. Soft Materials and Bioprinting

    • Deborah Munro
    Pages 75-76

  10. Imaging and Metrology

    • Deborah Munro
    Pages 77-79

  11. Testing

    • Deborah Munro
    Pages 81-94

  12. Transporting

    • Deborah Munro
    Pages 95-96

  13. Regulatory Approval Pathways

    • Deborah Munro
    Pages 97-108

  14. Locations of US Facilities

    • Deborah Munro
    Pages 109-134

  15. Meet the Lab Directors

    • Deborah Munro
    Pages 135-140

  16. Collaborating with a Facility

    • Deborah Munro
    Pages 141-149

  17. Beyond NNCI: International Facilities

    • Deborah Munro
    Pages 151-170

  18. Intellectual Property

    • Deborah Munro
    Pages 171-173

  19. Getting Project Assistance

    • Deborah Munro
    Pages 175-177

  20. Costs

    • Deborah Munro
    Pages 179-182
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Keywords

About this book

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. 

Authors and Affiliations

  • College of Engineering, University of Canterbury, Christchurch, New Zealand

    Deborah Munro

About the author

Dr. Deborah Munro is a Senior Lecturer in the bioengineering track within the mechanical engineering department at the University of Canterbury, Christchurch, and has more than 30 years of experience in mechanical and biomedical engineering. She earned her bachelor’s degree in mechanical engineering from the University of the Pacific, her master’s degree in mechanical engineering from Stanford University, and her doctorate in biological systems engineering from the University of California at Davis. 



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