- Describes modern numerical methods for MEMS analysis and design
- Reports on automated optimal design and field-based models of MEMS
- Shows applications to NEMS devices as well
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- About this book
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This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.
- Table of contents (14 chapters)
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Introduction
Pages 1-3
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MEMS Modelling: Distributed versus Lumped Parameter Models
Pages 5-7
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Engineering Electrostatics and Boundary-Value Problems
Pages 9-29
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Engineering Magnetostatics and Boundary-Value Problems
Pages 31-45
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Steady Conduction Field and Boundary-Value Problems
Pages 47-53
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Table of contents (14 chapters)
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Bibliographic Information
- Bibliographic Information
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- Book Title
- MEMS: Field Models and Optimal Design
- Authors
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- Paolo Di Barba
- Slawomir Wiak
- Series Title
- Lecture Notes in Electrical Engineering
- Series Volume
- 573
- Copyright
- 2020
- Publisher
- Springer International Publishing
- Copyright Holder
- Springer Nature Switzerland AG
- eBook ISBN
- 978-3-030-21496-8
- DOI
- 10.1007/978-3-030-21496-8
- Hardcover ISBN
- 978-3-030-21495-1
- Softcover ISBN
- 978-3-030-21498-2
- Series ISSN
- 1876-1100
- Edition Number
- 1
- Number of Pages
- IX, 190
- Topics
