Authors:
- Provides comprehensive design guidance on piezoresistance
- Includes an overview of applications requirements
- Codifies the design of piezoresistors in MEMS
- Case study approach includes the design of strain gauges and uniaxial piezoresistors, displacement sensing cantilevers, and pressure sensors
Part of the book series: Microsystems and Nanosystems (MICRONANO)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology.Â
Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
Authors and Affiliations
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Mechanical Engineering, Stanford University, Stanford, USA
Joseph C. Doll, Beth L. Pruitt
Bibliographic Information
Book Title: Piezoresistor Design and Applications
Authors: Joseph C. Doll, Beth L. Pruitt
Series Title: Microsystems and Nanosystems
DOI: https://doi.org/10.1007/978-1-4614-8517-9
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science+Business Media New York 2013
Hardcover ISBN: 978-1-4614-8516-2Published: 23 October 2013
Softcover ISBN: 978-1-4939-5554-1Published: 23 August 2016
eBook ISBN: 978-1-4614-8517-9Published: 30 October 2013
Series ISSN: 2198-0063
Series E-ISSN: 2198-0071
Edition Number: 1
Number of Pages: XI, 245
Number of Illustrations: 15 b/w illustrations, 86 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Theoretical and Applied Mechanics