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Springer Series in Materials Science

Metal-Dielectric Interfaces in Gigascale Electronics

Thermal and Electrical Stability

Authors: He, Ming, Lu, Toh-Ming

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  • Presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces
  • Features fundamental considerations in the physics and chemistry of metal-dielectric interactions
  • Explores mechanisms of metal atom diffusion and metal ion drift in dielectrics
  • Provides keys to understanding reliability in gigascale electronics
  • Focuses on a dynamic area of current research that is a foundation of future interconnect systems, memristors, and solid-state electrolyte devices
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About this book

Metal-dielectric interfaces are ubiquitous in modern electronics. As advanced gigascale electronic devices continue to shrink, the stability of these interfaces is becoming an increasingly important issue that has a profound impact on the operational reliability of these devices. In this book, the authors present the basic science underlying  the thermal and electrical stability of metal-dielectric interfaces and its relationship to the operation of advanced interconnect systems in gigascale electronics. Interface phenomena, including chemical reactions between metals and dielectrics, metallic-atom diffusion, and ion drift, are discussed based on fundamental physical and chemical principles. Schematic diagrams are provided throughout the book to illustrate  interface phenomena and the principles that govern them.

Metal-Dielectric Interfaces in Gigascale Electronics  provides a unifying approach to the diverse and sometimes contradictory test results that are reported in the literature on metal-dielectric interfaces. The goal is to provide readers with a clear account of the relationship between interface science and its applications in interconnect structures. The material presented here will also be of interest to those engaged in field-effect transistor and memristor device research, as well as university researchers and industrial scientists working in the areas of electronic materials processing, semiconductor manufacturing, memory chips, and IC design.

Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook 93,08 €
price for Spain (gross)
  • ISBN 978-1-4614-1812-2
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 135,19 €
price for Spain (gross)
Softcover 116,63 €
price for Spain (gross)
Rent the eBook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Metal-Dielectric Interfaces in Gigascale Electronics
Book Subtitle
Thermal and Electrical Stability
Authors
Series Title
Springer Series in Materials Science
Series Volume
157
Copyright
2012
Publisher
Springer-Verlag New York
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-1-4614-1812-2
DOI
10.1007/978-1-4614-1812-2
Hardcover ISBN
978-1-4614-1811-5
Softcover ISBN
978-1-4939-4308-1
Series ISSN
0933-033X
Edition Number
1
Number of Pages
XI, 149
Topics

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