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Signal Measurement and Estimation Techniques for Micro and Nanotechnology

  • Book
  • © 2011

Overview

Editors:
  1. Cédric Clévy

    1. ENSMM/UTBM, AS2M Department, FEMTO-ST Institute, UMR CNRS 6174 - UFC, Besançon, France

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  2. Micky Rakotondrabe

    1. , ENSMM / UTBM, FEMTO-ST Institute, UMR CNRS 6174 - UFC, Besançon, France

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  3. Nicolas Chaillet

    1. FEMTO-ST Institute, Besançon, France

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  • Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions

  • Discusses automated micro-assembly, and control of micro-nano robotic devices

  • Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes

  • Includes supplementary material: sn.pub/extras

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-x
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  2. Microscale Specificities

    • Cédric Clévy, Micky Rakotondrabe
    Pages 1-27

  3. Self-Sensing Measurement in Piezoelectric Cantilevered Actuators for Micromanipulation and Microassembly Contexts

    • Ioan Alexandru Ivan, Micky Rakotondrabe, Philippe Lutz, Nicolas Chaillet
    Pages 29-69

  4. Kalman Filtering Applied to Weak Force Measurement and Control in the Microworld

    • Mokrane Boudaoud, Yassine Haddab, Yann Le Gorrec
    Pages 71-91

  5. Microforce-Sensing Tools and Methodologies for Micromechanical Metrology

    • Simon D. Muntwyler, Felix Beyeler, Bradley J. Nelson
    Pages 93-131

  6. Cellular Force Measurement Using Computer Vision Microscopy and a Polymeric Microdevice

    • Xinyu Liu, Roxanne Fernandes, Andrea Jurisicova, Robert F. Casper, Yu Sun
    Pages 133-151

  7. In Situ Characterizations of Thin-Film Nanostructures with Large-Range Direct Force Sensing

    • Gilgueng Hwang, Juan Camilo Acosta, Hideki Hashimoto, Stephane Regnier
    Pages 153-191

  8. A Mechanism Approach for Enhancing the Dynamic Range and Linearity of MEMS Optical Force Sensing

    • Gloria J. Wiens, Gustavo A. Roman
    Pages 193-221

  9. Observer Approach for Parameter and Force Estimation in Scanning Probe Microscopy

    • Gildas Besançon, Alina Voda
    Pages 223-239

  10. Back Matter

    Pages 241-242
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Keywords

About this book

<em>Signal Measurement and Estimation Techniques for Micro and Nanotechnology</em>  discusses micro, nano and robotic cells and gives a state-of-the-art  presentation of the different techniques and solutions to measure and estimate  signals at the micro and nano scale. New technologies and applications such as  micromanipulation (artificial components, biological objects), micro-assembly  (MEMS, MOEMS, NEMS) and&nbsp;material and surface force characterization are covered.  The importance of sensing at the micro and nano scale is presented as a key  issue in control systems, as well as for&nbsp;understanding the physical phenomena of  these systems. The book also: <ul>
    <li>Explains issues that make signal measurement and estimation techniques  difficult at the micro-nano-scale and offers solutions</li>
    <li>Discusses automated micro-assembly, and control of micro-nano robotic devices</li>
    <li>Presents and links signal measurement and estimation techniques for  micro-nano scale systems with microfabrication methods, sensors integration and  control schemes</li>
</ul>
<em>Signal Measurement and Estimation Techniques for Micro and  Nanotechnology</em> is a must-read for researchers and engineers working in MEMS and  control systems.

Editors and Affiliations

  • ENSMM/UTBM, AS2M Department, FEMTO-ST Institute, UMR CNRS 6174 - UFC, Besançon, France

    Cédric Clévy

  • , ENSMM / UTBM, FEMTO-ST Institute, UMR CNRS 6174 - UFC, Besançon, France

    Micky Rakotondrabe

  • FEMTO-ST Institute, Besançon, France

    Nicolas Chaillet

Bibliographic Information

  • Book Title: Signal Measurement and Estimation Techniques for Micro and Nanotechnology

  • Editors: Cédric Clévy, Micky Rakotondrabe, Nicolas Chaillet

  • DOI: https://doi.org/10.1007/978-1-4419-9946-7

  • Publisher: Springer New York, NY

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: Springer Science+Business Media, LLC 2011

  • Hardcover ISBN: 978-1-4419-9945-0Published: 25 July 2011

  • Softcover ISBN: 978-1-4899-9039-6Published: 26 November 2014

  • eBook ISBN: 978-1-4419-9946-7Published: 25 July 2011

  • Edition Number: 1

  • Number of Pages: X, 242

  • Topics: Control, Robotics, Mechatronics, Nanotechnology and Microengineering, Signal, Image and Speech Processing

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