Overview
- Provides a thorough knowledge of design and fabrication of nano and micro devices
- Applies production and research lab techniques to a variety of materials
- Discusses thin film deposition, pulsed water drop machining and other techniques
- Includes supplementary material: sn.pub/extras
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Table of contents (12 chapters)
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Front Matter
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Back Matter
Keywords
About this book
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.
Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.
Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining.
Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.
Authors and Affiliations
About the author
Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K.
Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy.
Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.
Bibliographic Information
Book Title: Micro and Nanomanufacturing
Authors: Mark J. Jackson
DOI: https://doi.org/10.1007/b136902
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag US 2007
Softcover ISBN: 978-1-4419-3845-9Published: 29 October 2010
eBook ISBN: 978-0-387-26132-4Published: 19 June 2007
Edition Number: 1
Number of Pages: X, 702
Topics: Nanotechnology and Microengineering, Mechanical Engineering, Electronics and Microelectronics, Instrumentation, Manufacturing, Machines, Tools, Processes