Optimal Synthesis Methods for MEMS

1. Front Matter

   Pages i-xiii

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2. Introduction

   • G. K. Ananthasuresh

   Pages 1-12

3. Synthesis for Mechanical Behavior

   • Anupam Saxena, G. K. Ananthasuresh

   Pages 13-42

4. Synthesis of Electro-Statically Actuated MEMS

   • Wenjing Ye, Subrata Mukherjee

   Pages 43-77

5. Synthesis Methods for Electro-Thermal Actuation

   • G. K. Ananthasuresh

   Pages 79-119

6. Synthesis with Piezoelectric Actuation

   • Emílio Carlos Nelli Silva

   Pages 121-153

7. Synthesis of Piezocomposites

   • Emílio Carlos Nelli Silva

   Pages 155-191

8. Synthesis of Periodic Micro Mechanisms

   • Ole Sigmund

   Pages 193-221

9. Process Synthesis

   • Carlos Mastrangelo, Edwin Carlen

   Pages 223-265

10. Mask Synthesis

    • Radha Sarma, G. K. Ananthasuresh

    Pages 267-295

11. System-Level Synthesis

    • Tamal Mukherjee, Gary K. Fedder

    Pages 297-316

12. Back Matter

    Pages 317-320

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The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process ­ In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

• Motor
• Potential
• Transducer
• design
• electricity
• finite element method
• logic
• manufacturing
• material
• microelectromechanical system (MEMS)
• model
• modeling
• piezoelectricity
• simulation
• software

• University of Pennsylvania, Philadelphia, USA

  G. K. Ananthasuresh

Policies and ethics