Microsystems

Bringing Scanning Probe Microscopy up to Speed

Authors: Minne, Stephen C., Manalis, Scott R., Quate, Calvin F.

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  • ISBN 978-1-4615-5167-6
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  • ISBN 978-0-7923-8466-3
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About this book

Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented.
The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

Reviews

`The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.'
The Physicist, 37:2 (2000)

Table of contents (9 chapters)

Table of contents (9 chapters)

Buy this book

eBook 74,89 €
price for Spain (gross)
  • ISBN 978-1-4615-5167-6
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 114,39 €
price for Spain (gross)
  • ISBN 978-0-7923-8466-3
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 93,59 €
price for Spain (gross)
  • ISBN 978-1-4613-7353-7
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Bringing Scanning Probe Microscopy up to Speed
Authors
Series Title
Microsystems
Series Volume
3
Copyright
1999
Publisher
Springer US
Copyright Holder
Kluwer Academic Publishers
eBook ISBN
978-1-4615-5167-6
DOI
10.1007/978-1-4615-5167-6
Hardcover ISBN
978-0-7923-8466-3
Softcover ISBN
978-1-4613-7353-7
Series ISSN
1389-2134
Edition Number
1
Number of Pages
XIII, 159
Topics