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Introduction to VLSI Process Engineering

  • Book
  • © 1993

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Editors:
  1. The Society of Chemical Engineers of Japan
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Table of contents (8 chapters)

  1. Front Matter

    Pages i-xiii
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  2. Coming age of VLSI

    • The Society of Chemical Engineers of Japan
    Pages 1-6

  3. Semiconductor market

    • The Society of Chemical Engineers of Japan
    Pages 7-21

  4. Evolution of semiconductors

    • The Society of Chemical Engineers of Japan
    Pages 22-49

  5. Characteristics of VLSI

    • The Society of Chemical Engineers of Japan
    Pages 50-70

  6. VLSI process engineering operations

    • The Society of Chemical Engineers of Japan
    Pages 71-120

  7. Packaging and process monitoring technology

    • The Society of Chemical Engineers of Japan
    Pages 121-146

  8. Production of silicon wafers and environmental problems

    • The Society of Chemical Engineers of Japan
    Pages 147-165

  9. Process engineering aspects of VLSI production

    • The Society of Chemical Engineers of Japan
    Pages 166-192

  10. Back Matter

    Pages 193-210
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Keywords

About this book

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

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...an extremely good text... - Microelectronics Journal

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