Microsystems

Dynamics of Microelectromechanical Systems

Authors: Lobontiu, Nicolae

Free Preview
  • Focuses on the mechanical domain and specifically the quasi-static sub-domain, which is at the core of most of the MEMS
  • Provides a more in-depth look at the main problems that involve reliable modeling, analysis, and design
see more benefits

Buy this book

eBook 78,10 €
price for Spain (gross)
  • ISBN 978-0-387-68195-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 103,99 €
price for Spain (gross)
  • ISBN 978-0-387-36800-9
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 97,18 €
price for Spain (gross)
  • ISBN 978-1-4419-4225-8
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
About this Textbook

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

  • An in-depth treatment of problems that involve reliable modeling, analysis and design,
  • Analytical models with correct dependences on service dimensions,
  • Cantilever based systems for nanofabrication researchers and designers, and
  • Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Table of contents (4 chapters)

Table of contents (4 chapters)

Buy this book

eBook 78,10 €
price for Spain (gross)
  • ISBN 978-0-387-68195-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 103,99 €
price for Spain (gross)
  • ISBN 978-0-387-36800-9
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 97,18 €
price for Spain (gross)
  • ISBN 978-1-4419-4225-8
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock
  • The final prices may differ from the prices shown due to specifics of VAT rules
Loading...

Bibliographic Information

Bibliographic Information
Book Title
Dynamics of Microelectromechanical Systems
Authors
Series Title
Microsystems
Series Volume
17
Copyright
2007
Publisher
Springer US
Copyright Holder
Springer-Verlag US
eBook ISBN
978-0-387-68195-5
DOI
10.1007/978-0-387-68195-5
Hardcover ISBN
978-0-387-36800-9
Softcover ISBN
978-1-4419-4225-8
Series ISSN
1389-2134
Edition Number
1
Number of Pages
X, 403
Topics