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Mems/Nems

(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS

Editors: Leondes, Cornelius T. (Ed.)

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  • ISBN 978-0-387-25786-0
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Hardcover 935,99 €
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  • ISBN 978-0-387-24520-1
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Softcover 935,99 €
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  • ISBN 978-1-4899-7739-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
About this book

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, thereby, making possible the realization of complete systems-on-a-chip.

Microelectromechanic systems will revolutionize the design of electronics products and enable the creation of entirely new product categories.   Through miniaturization, batch fabrication, and integration with electronics, this technology will enable the development of smart products by providing the required interface between the available computational power and physical world through the perception and control capabilities of micro devices or systems (e.g., microsensors and microactuators). Micromechanical devices and systems are inherently smaller, lighter and faster than their macroscopic counterparts, and in many cases are also more precise. MEMS devices are emerging as a product differentiators in numerous markets. MEMS technology is expected to have enormous opportunities in the commercial markets due to the low-cost, high functionality, and small size and weight of the devices. MEMS technology allows much more functionality to be placed within a given space than conventional technologies.

A special class of MEMS is optical MEMS technology, also referred to as MOEMS (Micro Optical Mechanical Systems). MOEMS have become increasingly important in the development of many networks, telecommunications and optical systems. Potential MOEMS applications include optical data storage, optical sensors, bead mounted displays and projection systems. State-of-the-art devices include torsional mirrors, digital micromirror devices, laser scanners, optical shutters, microooptical switches, and micromachined corner cube reflectors.

Nanoelectromechanical systems (NEMS) are MEMS scaled to submicrometer dimensions, to exploit the mechanical degree of freedom on the nanometer scale. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving high mechanical responsivity. This combination of attributes translates directly into high force sensitivity, operability at ultra-low power, and the ability to induce non-linearity with very modest control forces, leading to potential payoffs in a diverse range of fields from medicine to biotechnology.

The MEMS/NEMS HANDBOOK consists of five volumes and will provide a significant and uniquely comprehensive reference source for research workers, practitioners, computer scientists, students, technologists and others on the international scene for years to come:

(1) MEMS/NEMS Design Methods in MEMS/NEMS

(2) Fabrication Techniques in MEMS/NEMS

(3) Manufacturing Methods

(4)  Sensors & Actuators

(5) Medical Applications and MOEMS

This landmark work features contributions from more than 100 of the world's foremost authorities on the key technologies and the greatly significant application areas of MEMS/NEMS. The contributors come from industry, government and academia.

Reviews

From the Foreword:

The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS.... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS.... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future.

Xuan F Zha

National Institute of Standards and Technology

Gaithersburg, Maryland, USA

July 30, 2005

 


Table of contents (43 chapters)

Table of contents (43 chapters)
  • Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices

    Pages 1-34

    Zha, Xuan F

  • Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

    Pages 35-71

    Zha, Xuan F

  • Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

    Pages 73-109

    Zha, Xuan F (et al.)

  • Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications

    Pages 111-150

    Lin, W. Z. (et al.)

  • Techniques in Global Optimal Design for MEMS & Their Applications

    Pages 151-172

    Ongkodjojo, Andojo (et al.)

Buy this book

eBook 760,41 €
price for Spain (gross)
  • ISBN 978-0-387-25786-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover 935,99 €
price for Spain (gross)
  • ISBN 978-0-387-24520-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
Softcover 935,99 €
price for Spain (gross)
  • ISBN 978-1-4899-7739-7
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
  • The final prices may differ from the prices shown due to specifics of VAT rules
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Bibliographic Information

Bibliographic Information
Book Title
Mems/Nems
Book Subtitle
(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
Editors
  • Cornelius T. Leondes
Copyright
2006
Publisher
Springer US
Copyright Holder
Springer-Verlag US
Distribution Rights
Distribution rights for India: CBS Publishers, New Delhi, India
eBook ISBN
978-0-387-25786-0
DOI
10.1007/b136111
Hardcover ISBN
978-0-387-24520-1
Softcover ISBN
978-1-4899-7739-7
Edition Number
1
Number of Pages
XVIII, 2094
Topics