Authors:
- Introduces the MEMS fabrication processes and equipment
- Explains how to take the first steps - where to start and get initial advice and further assistance
- Includes a global list of MEMS facilities and resources with contact information
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Table of contents (20 chapters)
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Front Matter
About this book
Authors and Affiliations
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College of Engineering, University of Canterbury, Christchurch, New Zealand
Deborah Munro
About the author
Bibliographic Information
Book Title: DIY MEMS
Book Subtitle: Fabricating Microelectromechanical Systems in Open Use Labs
Authors: Deborah Munro
DOI: https://doi.org/10.1007/978-3-030-33073-6
Publisher: Springer Cham
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer Nature Switzerland AG 2019
Hardcover ISBN: 978-3-030-33072-9Published: 06 December 2019
Softcover ISBN: 978-3-030-33075-0Published: 06 December 2020
eBook ISBN: 978-3-030-33073-6Published: 25 November 2019
Edition Number: 1
Number of Pages: XVI, 188
Number of Illustrations: 15 b/w illustrations, 4 illustrations in colour
Topics: Electronic Circuits and Devices, Electronics and Microelectronics, Instrumentation, Biomedical Engineering/Biotechnology, Nanotechnology and Microengineering, Industrial and Production Engineering