Overview
Examples from different fields of application are given
Cutting-edge microfabrication technologies are included
Valuable for graduate and undergraduate students as well as for engineers in the field
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Table of contents (6 chapters)
Keywords
About this book
Authors and Affiliations
About the authors
Prof. Dr. Stephanus Büttgenbach is a professor emeritus at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research are silicon micromachining, quartz technology, MEMS-CAD, microactuators, microsensors, lab-on-chip systems, and microreactors.
Prof. Dr. Iordania Constantinou is a junior professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her fields of research include amorphous semiconductors, organic electronics, micro- and nanosensors, and microfluidics.
Prof. Dr. Andreas Dietzel is a professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research include systems in foil, laser microstructuring, point-of-care systems, MagMEMS, MEMS simulation, and the design and fabrication of microfluidic systems with applications in life sciences.
Dr.-Ing. Monika Leester-Schädel is an academic senior councilor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her special fields of work are micromechatronics, sensor systems for aerospace, and microactuators.
Bibliographic Information
Book Title: Case Studies in Micromechatronics
Book Subtitle: From Systems to Processes
Authors: Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
DOI: https://doi.org/10.1007/978-3-662-61320-7
Publisher: Springer Berlin, Heidelberg
eBook Packages: Intelligent Technologies and Robotics, Intelligent Technologies and Robotics (R0)
Copyright Information: Springer-Verlag GmbH Germany, part of Springer Nature 2020
Softcover ISBN: 978-3-662-61319-1Published: 16 May 2020
eBook ISBN: 978-3-662-61320-7Published: 15 May 2020
Edition Number: 1
Number of Pages: VII, 298
Number of Illustrations: 248 b/w illustrations
Topics: Mechatronics, Nanotechnology and Microengineering, Manufacturing, Machines, Tools, Processes, Biomedical Engineering and Bioengineering