Editors:
- Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators
- Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators
- Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs
- Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation
- Includes supplementary material: sn.pub/extras
Part of the book series: Microsystems and Nanosystems (MICRONANO)
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Table of contents (16 chapters)
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Front Matter
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Materials for Piezoelectric MEMS Resonators
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Front Matter
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Design of Piezoelectric MEMS Resonators
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Front Matter
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Manufacturing and Reliability of Piezoelectric MEMS Resonators
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Front Matter
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Real World Implementations
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Front Matter
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About this book
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
Editors and Affiliations
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MEMS Division, Engineering Director, IDT Inc., San Jose, USA
Harmeet Bhugra
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Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, USA
Gianluca Piazza
About the editors
Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.
Bibliographic Information
Book Title: Piezoelectric MEMS Resonators
Editors: Harmeet Bhugra, Gianluca Piazza
Series Title: Microsystems and Nanosystems
DOI: https://doi.org/10.1007/978-3-319-28688-4
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2017
Hardcover ISBN: 978-3-319-28686-0Published: 18 January 2017
Softcover ISBN: 978-3-319-80405-7Published: 12 July 2018
eBook ISBN: 978-3-319-28688-4Published: 09 January 2017
Series ISSN: 2198-0063
Series E-ISSN: 2198-0071
Edition Number: 1
Number of Pages: XII, 424
Number of Illustrations: 104 b/w illustrations, 127 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Nanotechnology and Microengineering, Nanotechnology, Optical and Electronic Materials