Overview
- Brings together researchers in all areas of microsystems technology, with a focus on micro-actuators and micro-mechanisms
- Provides a forum for researchers in MEMS, precision machining, compliant mechanisms, micro-fabrication, and related areas
- Written by leading experts in the field
Part of the book series: Mechanisms and Machine Science (Mechan. Machine Science, volume 96)
Included in the following conference series:
Conference proceedings info: MAMM 2020.
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Table of contents (12 papers)
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Front Matter
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Back Matter
Other volumes
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Microactuators, Microsensors and Micromechanisms
Keywords
About this book
This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication.
The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology.
The conference was organized underthe patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
Editors and Affiliations
Bibliographic Information
Book Title: Microactuators, Microsensors and Micromechanisms
Book Subtitle: MAMM 2020
Editors: Lena Zentner, Steffen Strehle
Series Title: Mechanisms and Machine Science
DOI: https://doi.org/10.1007/978-3-030-61652-6
Publisher: Springer Cham
eBook Packages: Intelligent Technologies and Robotics, Intelligent Technologies and Robotics (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2021
Hardcover ISBN: 978-3-030-61651-9Published: 14 October 2020
Softcover ISBN: 978-3-030-61654-0Published: 15 October 2021
eBook ISBN: 978-3-030-61652-6Published: 13 October 2020
Series ISSN: 2211-0984
Series E-ISSN: 2211-0992
Edition Number: 1
Number of Pages: VIII, 149
Number of Illustrations: 50 b/w illustrations
Topics: Mechatronics, Nanotechnology, Machinery and Machine Elements, Electronics and Microelectronics, Instrumentation