Nanostructured Thermoelectric Films

1. Front Matter

   Pages i-xx

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2. Research Background and Current Situation

   • Zhiyu Hu, Zhenhua Wu

   Pages 1-26

3. Thermoelectric Performance Testing Methods and Devices

   • Zhiyu Hu, Zhenhua Wu

   Pages 27-51

4. Si-Based Multilayer Films

   • Zhiyu Hu, Zhenhua Wu

   Pages 53-85

5. Sb2Te3-Based Multilayer Films

   • Zhiyu Hu, Zhenhua Wu

   Pages 87-112

6. Preparation of Sb2Te3/Bi2Te3 Thin Films by Magnetron Sputtering

   • Zhiyu Hu, Zhenhua Wu

   Pages 113-184

7. Growth of Sb2Te3 Films by Molecular Beam Epitaxial Method

   • Zhiyu Hu, Zhenhua Wu

   Pages 185-219

8. Molecular Beam Epitaxial Growth of Bi2Te3 Thin Films

   • Zhiyu Hu, Zhenhua Wu

   Pages 221-243

9. Summary and Outlook

   • Zhiyu Hu, Zhenhua Wu

   Pages 245-248

10. Back Matter

    Pages 249-262

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This book presents a range of low-dimensional superlattice thermoelectric materials based on physical vapor deposition (PVD) methods and explores various material types, thicknesses, and processing conditions. With the advances made in the performance of semiconductor thermoelectric materials and the efficiency of thermoelectric devices in recent years, thermoelectric power generation systems are likely to replace traditional mechanical heat engines, offering an environmentally friendlier alternative. The use of low-dimensional, nanostructured materials can significantly increase the density of states near the Fermi level and greatly improve the thermoelectric properties of materials. In addition, the book demonstrates that it is possible to influence thermoelectric performance, establish more accurate mathematical models through the regulation of relevant parameters, and ultimately improve the thermoelectric figure of merit (ZT).

• Thermoelectric material
• Thin film
• Nano-construction
• Multilayer
• Micro/nano-fabrication
• Thermoelectric device
• MEMS thermoelectric chip

• Shanghai Jiao Tong University, Shanghai, China

  Zhiyu Hu, Zhenhua Wu

Prof. Dr. Zhiyu Hu (Ph.D. MBA), National Chair Professor of China, is holding a Zhi Yuan Chair professorship at Shanghai Jiao Tong University (SJTU) and served as the director of National Key Laboratory of Science and Technology on Micro-/Nano-Fabrication (2012-2018). He received his Ph.D. in physics and MBA from the University of Tennessee, Knoxville in 2000 and 2004 respectfully. He is the founder and director of the Institute of NanoMicroEnergy since 2008. Dr. Hu is an adjunct professor appointment at University of Tennessee, Knoxville, Tennessee, USA plus other honorary positions in several universities and institutes. He was a research staff member at Oak Ridge National Laboratory (ORNL) of the U.S. Department of Energy. His research interests are in NEMS- and MEMS-based devices, nanoscale energy conversion, and nano-materials. Dr. Hu is the author 100+ publications in peer reviewed journals, 6 books and book chapters; 70+ invited talks; 70+ conference presentations and 55 published and pending patents. He is the recipient of many awards that includes Chinese Society of Micro-Nano Technology Innovation Award, Discover Magazine Award, National and Regional Federal Laboratory Consortium awards and several awards from ORNL including The Inventor of the Year Award (2000). Dr. Hu’s work generated many press accolades and mentions around the world. He is an active member of APS, ASME, ACS, ECS, MRS, IECS and the National Physics Honor Society Sigma Pi Sigma. He is an executive member of Nano Engineering Council of ASME and a committee member of the Sensor Division of ECS. He supervised 58 Master’s students, Ph.D. students and Post-doctoral fellows.

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