Overview
- Covers the principles, operation, and applications of the modern 21st century micro-nano devices and systems
- Addresses fabrication technologies such as CMOS-MEMS, Piezoelectric, and other special MEMS processes
- Designed to provide a didactic approach to explaining scientific facts and figures in more lucid ways
Part of the book series: Springer Tracts in Electrical and Electronics Engineering (STEEE)
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About this book
This book covers the principles, operation, and applications of the modern micro-nano devices being developed to address global twenty-first-century challenges. The subject of this book is Micro-Nano Systems in the twenty-first century. The major areas of applications cover medical diagnostics, 5G/6G communication, inertial, space, geography and resource exploration, defense, aviation, etc. This book provides the readers with a comprehensive outlook on the topics to help understand the physical scientific principles and techniques being applied to the design and development of devices, sensors, and actuators using Micro-Nano System Technology (MST). The book addresses fabrication technologies such as CMOS-MEMS, Piezoelectric, and other special MEMS processes, where novel transducers are being designed and developed for ultrasound, energy harvesting, data storage, computing, inertial, fluidics, optomechanical, etc. The book serves as a tutorial guide to graduate students, researchers, engineers, other large technical audiences, and also the general public to understand these topics in a systematic and more thorough way by providing a range of illustrations, comparative charts/tables, equations, analysis, and plots/graphs. In a nutshell, the book is designed to provide a didactic approach to explaining scientific facts and figures in more lucid ways. The students will get the engineering and scientific know-how of modern micro and nano system technology, a range of transduction principles, and potential applied application areas. Readers will understand (through first-hand equations, principles of operations, solved examples, notes, several illustrations, and graphs) how to design, and develop a range of applications in microsystem technology.
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Keywords
- Acoustic Devices
- Vibration-Powered Energy Harvesting
- Inertial Measurement Unit (IMU)
- Piezoelectric MEMS
- Nanoscale Devices
- Micro/Nanoelectromechanical systems (M/NEMS)
- Piezoelectric Micromachined Ultrasonic Transducer (PMUT)
- Radio Frequency (RF) MEMS
- Gas Sensor
- Capacitive Micromachined Ultrasonic Transducer (CMUT)
Table of contents (8 chapters)
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Front Matter
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Transduction in Micro-Nano Devices
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Front Matter
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Micro-Nano Systems for Healthcare
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Front Matter
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Energy Harvesting
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Front Matter
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Materials and Packaging
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Front Matter
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Editors and Affiliations
Accessibility Information
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Bibliographic Information
Book Title: Micro- and Nano-Systems in 21st-Century
Book Subtitle: Designs, Developments, Applications and Perspective
Editors: Vinayak Pachkawade, Koushik Guha
Series Title: Springer Tracts in Electrical and Electronics Engineering
DOI: https://doi.org/10.1007/978-981-96-4659-3
Publisher: Springer Singapore
eBook Packages: Engineering, Engineering (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025
Hardcover ISBN: 978-981-96-4658-6Published: 16 July 2025
Softcover ISBN: 978-981-96-4661-6Due: 30 July 2026
eBook ISBN: 978-981-96-4659-3Published: 15 July 2025
Series ISSN: 2731-4200
Series E-ISSN: 2731-4219
Edition Number: 1
Number of Pages: VIII, 308
Number of Illustrations: 15 b/w illustrations, 103 illustrations in colour
Topics: Nanotechnology and Microengineering, Materials Science, general, Electronics and Microelectronics, Instrumentation