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Microtransducer CAD

Physical and Computational Aspects

  • Book
  • © 1999

Overview

Authors:
  1. Arokia Nathan

    1. Dept. of Electrical and Computer Engineering, University of Waterloo, Waterloo, Canada

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    You can also search for this author in PubMed   Google Scholar

  2. Henry Baltes

    1. Physical Electronics Laboratory, ETH Hoenggerberg, Zürich, Switzerland

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    You can also search for this author in PubMed   Google Scholar

  • First book on Computer-Aided-Design of microsensors * Simulation is much more complex than of standard integrated circuits *
  • Authors are leading experts in Europe and America

Part of the book series: Computational Microelectronics (COMPUTATIONAL)

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Table of contents (9 chapters)

  1. Front Matter

    Pages I-XVIII
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  2. Introduction

    • Arokia Nathan, Henry Baltes
    Pages 1-29

  3. Basic Electronic Transport

    • Arokia Nathan, Henry Baltes
    Pages 30-68

  4. Radiation Effects on Carrier Transport

    • Arokia Nathan, Henry Baltes
    Pages 69-103

  5. Magnetic Field Effects on Carrier Transport

    • Arokia Nathan, Henry Baltes
    Pages 104-139

  6. Thermal Non-Uniformity Effects on Carrier Transport

    • Arokia Nathan, Henry Baltes
    Pages 140-201

  7. Mechanical Effects on Carrier Transport

    • Arokia Nathan, Henry Baltes
    Pages 202-261

  8. Mechanical and Fluidic Signals

    • Arokia Nathan, Henry Baltes
    Pages 262-315

  9. Micro-Actuation

    • Arokia Nathan, Henry Baltes
    Pages 316-375

  10. Microsystem Simulation

    • Arokia Nathan, Henry Baltes
    Pages 376-419

  11. Back Matter

    Pages 420-427
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Keywords

About this book

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Authors and Affiliations

  • Dept. of Electrical and Computer Engineering, University of Waterloo, Waterloo, Canada

    Arokia Nathan

  • Physical Electronics Laboratory, ETH Hoenggerberg, Zürich, Switzerland

    Henry Baltes

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