Editors:
- Comprehensive treatment of emerging devices, their operation and characterization
- Authors provide a balance of industry and academic expertise
- Includes images of state-of-the-art integrated devices
- Combines semiconductor physics and materials analysis
- Provides an in depth collection of applied electrical AFM techniques
Part of the book series: NanoScience and Technology (NANO)
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Table of contents (12 chapters)
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Front Matter
About this book
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changedby the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Editors and Affiliations
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IMEC, Leuven, Belgium
Umberto Celano
About the editor
Umberto Celano is a senior research scientist at imec (Belgium), where his interests encompass solid-state physics and materials science for application in nanoelectronics and emerging devices. In this area, he conducted research at the border between engineering and fundamental science in various institutions such as KU Leuven, Osaka University, and Stanford University. He received his Ph.D. in Physics from the University of Leuven in 2015. Previously, Umberto obtained a B.Eng. in Electronic Engineering and an M.Sc. degree in Nanoelectronics from the University of Rome Sapienza, Italy.
Bibliographic Information
Book Title: Electrical Atomic Force Microscopy for Nanoelectronics
Editors: Umberto Celano
Series Title: NanoScience and Technology
DOI: https://doi.org/10.1007/978-3-030-15612-1
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer Nature Switzerland AG 2019
Hardcover ISBN: 978-3-030-15611-4Published: 24 August 2019
Softcover ISBN: 978-3-030-15614-5Published: 25 August 2020
eBook ISBN: 978-3-030-15612-1Published: 01 August 2019
Series ISSN: 1434-4904
Series E-ISSN: 2197-7127
Edition Number: 1
Number of Pages: XX, 408
Number of Illustrations: 26 b/w illustrations, 230 illustrations in colour
Topics: Spectroscopy and Microscopy, Characterization and Evaluation of Materials, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Nanoscale Science and Technology, Nanotechnology