Skip to main content
SpringerLink
Log in

Microsystems Dynamics

  • Book
  • © 2011

Overview

Authors:
  1. Vytautas Ostasevicius

    1. Institute for Hi-Tech Development, Kaunas University of Technology, Kaunas, Lithuania

    View author publications

    You can also search for this author in PubMed   Google Scholar

  2. Rolanas Dauksevicius

    1. , Institute for Hi-Tech Development, Kaunas University of Technology, Kaunas, Lithuania

    View author publications

    You can also search for this author in PubMed   Google Scholar

  • State of the art science
  • Applicable to modern technology
  • Fast developing field

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (5 chapters)

  1. Front Matter

    Pages i-viii
    Download chapter PDF

  2. Introduction

    • Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 1-10

  3. Modeling and Simulation of Contact-Type Electrostatic Microactuator

    • Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 11-52

  4. Dynamics of Elastic Vibro-Impact Microsystems

    • Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 53-132

  5. Theoretical Analysis of a Micromotor

    • Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 133-183

  6. Technological Realization of MEMS Structures and Their Experimental Investigation

    • Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 185-214
Back to top

Keywords

About this book

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Authors and Affiliations

  • Institute for Hi-Tech Development, Kaunas University of Technology, Kaunas, Lithuania

    Vytautas Ostasevicius

  • , Institute for Hi-Tech Development, Kaunas University of Technology, Kaunas, Lithuania

    Rolanas Dauksevicius

Bibliographic Information

Publish with us

Policies and ethics

Back to top

Search

Navigation