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  • © 1998

Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

Authors:

  • Main benefit is information about the physics of image formation and microanalysis in scanning electron microscopy
  • 2nd, completely revised and updated edition

Part of the book series: Springer Series in Optical Sciences (SSOS, volume 45)

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Table of contents (10 chapters)

  1. Front Matter

    Pages I-XIV
  2. Introduction

    • Ludwig Reimer
    Pages 1-12
  3. Electron Scattering and Diffusion

    • Ludwig Reimer
    Pages 57-134
  4. Electron Detectors and Spectrometers

    • Ludwig Reimer
    Pages 171-205
  5. Image Contrast and Signal Processing

    • Ludwig Reimer
    Pages 207-251
  6. Special Techniques in SEM

    • Ludwig Reimer
    Pages 289-328
  7. Crystal Structure Analysis by Diffraction

    • Ludwig Reimer
    Pages 329-377
  8. Elemental Analysis and Imaging with X-Rays

    • Ludwig Reimer
    Pages 379-447
  9. Back Matter

    Pages 449-529

About this book

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Reviews

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Authors and Affiliations

  • Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Münster, Germany

    Ludwig Reimer

Bibliographic Information

Buy it now

Buying options

eBook USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access