Overview
- The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (14 chapters)
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CCD Image Sensors
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Instabilities in Si, SiO2, and the Si-SiO2 Interface
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Effects of Radiation on the Si-SiO2 System
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Interaction of UV Radiation with the Si-SiO2 System
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Interaction of DUV Radiation with CCD Sensors
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Concluding Remarks & Future Research
Keywords
About this book
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
Authors and Affiliations
About the authors
Flora Li received her Bachelor of Applied Science degree in Electrical Engineering from University of Waterloo, Canada, in 2002. She completed her MASc degree in Electrical Engineering at University of Waterloo in 2003, where her research focus was on the investigation of deep-UV sensitive CCD image sensors and the related radiation damage issues. She is currently pursuing her Ph.D. degree in the field of organic electronics and polymer TFTs, under the supervision of Prof. Arokia Nathan at the University of Waterloo.
Arokia Nathan received his PhD in Electrical Engineering from the University of Alberta, Edmonton, Alberta, Canada, in 1988, where he was engaged in research related to the physics and numerical modeling of semiconductor microsensors. In 1987, he joined LSI Logic Corp., Santa Clara, CA where he worked on advanced multichip packaging techniques and related issues. Subsequently, he was at the Institute of Quantum Electronics, ETH Zürich, Switzerland. In 1989, he joined the Department of Electrical and Computer Engineering, University of Waterloo, where he is currently a Professor. In 1995, he was a Visiting Professor at the Physical Electronics Laboratory, ETH Zürich. His present research interests lie in fabrication of devices, circuits, and systems using disordered semiconductor, including organic, materials on rigid and mechanically flexible substrates for large area electronics. He held the DALSA/NSERC industrial research chair in sensor technology, and is a recipient of the Natural Sciences and Engineering Research Council E.W.R. Steacie Fellowship. He has published extensively in the field of sensor technology and CAD, and thin film transistor electronics, and is a co-author of the book, Microtransducer CAD, published by Springer in 1999.
Bibliographic Information
Book Title: CCD Image Sensors in Deep-Ultraviolet
Book Subtitle: Degradation Behavior and Damage Mechanisms
Authors: Flora M. Li, Arokia Nathan
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/b139047
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-22680-2Published: 01 March 2005
Softcover ISBN: 978-3-642-06152-3Published: 22 October 2010
eBook ISBN: 978-3-540-27412-4Published: 05 January 2006
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: XII, 232
Number of Illustrations: 84 b/w illustrations
Topics: Optical and Electronic Materials, Optics, Lasers, Photonics, Optical Devices, Engineering, general, Electronics and Microelectronics, Instrumentation