Overview
- Editors:
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Jan G. Korvink
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Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany
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Oliver Paul
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Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany
- Satisfies the demand for literature on analysis and design of microsystems
- Deals with a wide range of industrial applications
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Table of contents (17 chapters)
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- Osamu Tabata, Toshiyuki Tsuchiya
Pages 53-92
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- Jan G. Korvink, Evgenii B. Rudnyi, Andreas Greiner, Zhenyu Liu
Pages 93-186
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- Arokia Nathan, Karim S. Karim
Pages 281-343
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- Ming C. Wu, Pamela R. Patterson
Pages 345-402
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- Andreas Hierlemann, Henry Baltes
Pages 567-666
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- Jens Ducrée, Peter Koltay, Roland Zengerle
Pages 667-727
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- Whye-Kei Lye, Michael Reed
Pages 729-749
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- Paddy J. French, Pasqualina M. Sarro
Pages 805-851
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- Ulrike Wallrabe, Volker Salle
Pages 853-899
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- Piero Malcovati, Franco Maloberti
Pages 901-942
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Back Matter
Pages 943-965
About this book
MEMS are rapidly moving from the research laboratory to the mar ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabil ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market poten tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? Which skills in our current capability need only adaptation? What skills need to be added? Professors Jan Korvink and Oliver Paul have set out to answer these questions in a form that addresses the needs of companies, commercial practitioners, and technologists.
