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  • © 1977

Bau hybrider Mikroschaltungen

Einführung in die Dünn- und Dickschichttechnologie

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Part of the book series: Nachrichtentechnik (NACHRICHTENTECH, volume 3)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-IX
  2. Einführung und Überblick

    • Ernst Lüder
    Pages 1-7
  3. Kennzeichen der Schichtbauteile

    • Ernst Lüder
    Pages 8-24
  4. Substrate

    • Ernst Lüder
    Pages 25-31
  5. Dickschichttechnik

    • Ernst Lüder
    Pages 32-52
  6. Dünnschichttechnik

    • Ernst Lüder
    Pages 53-125
  7. Bonden

    • Ernst Lüder
    Pages 126-131
  8. Abgleich von Bauteilen

    • Ernst Lüder
    Pages 132-133
  9. Dünnschichttransistoren

    • Ernst Lüder
    Pages 134-144
  10. Back Matter

    Pages 145-166

Authors and Affiliations

  • Instituts für Netzwerk- und Systemtheorie, Universität Stuttgart, Deutschland

    Ernst Lüder

Bibliographic Information

  • Book Title: Bau hybrider Mikroschaltungen

  • Book Subtitle: Einführung in die Dünn- und Dickschichttechnologie

  • Authors: Ernst Lüder

  • Series Title: Nachrichtentechnik

  • DOI: https://doi.org/10.1007/978-3-642-95301-9

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag, Berlin/Heidelberg 1977

  • Softcover ISBN: 978-3-540-08289-7Published: 01 November 1977

  • eBook ISBN: 978-3-642-95301-9Published: 08 March 2013

  • Series ISSN: 0342-9148

  • Edition Number: 1

  • Number of Pages: X, 166

  • Topics: Communications Engineering, Networks

Buy it now

Buying options

eBook USD 49.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 49.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access