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Microsystems Mechanical Design

  • Book
  • © 2006

Overview

Editors:
  1. Francesco Bona

    1. University of Udine, Italy

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  2. Eniko T. Enikov

    1. University of Arizona, USA

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    You can also search for this editor in PubMed   Google Scholar

Part of the book series: CISM International Centre for Mechanical Sciences (CISM, volume 478)

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-vii
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  2. Introduction to Micro-Systems and to the Techniques for Their Fabrication

    • Eniko T. Enikov
    Pages 1-36

  3. Microstructures Under Electrostatic Loads: Discrete System Modelling

    • Francesco De Bona
    Pages 37-56

  4. Dynamics of Mechatronic Systems at Microscale

    • Eugenio G. M. Brusa
    Pages 57-80

  5. Continuum Microstructures Loaded Electrostatically

    • Francesco De Bona, Mircea Gh. Munteanu
    Pages 81-100

  6. Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection

    • Kalin V. Lazarov, Eniko T. Enikov
    Pages 101-118

  7. Design of Compliant Micromechanisms

    • Francesco De Bona, SaÅ¡a Zelenika
    Pages 119-134

  8. Micro- and Nano-assembly and Manipulation Techniques for MEMS

    • Eniko T. Enikov
    Pages 135-156

  9. Microfluidics: Device Science and Technology

    • Lap Man Lee, Luthur Siu Lun Cheung, Yitshak Zohar
    Pages 157-211
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Keywords

About this book

Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.

Editors and Affiliations

  • University of Udine, Italy

    Francesco Bona

  • University of Arizona, USA

    Eniko T. Enikov

About the editors

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.

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