Dry Etching for VLSI

1. Front Matter

   Pages i-xvii

   PDF

2. Introduction

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 1-4

3. The Plasma State

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 5-15

4. The ac Discharge

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 17-38

5. Gas and Surface Processes

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 39-73

6. Reactor Technology

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 75-98

7. Etch Processes

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 99-135

8. Diagnostics and Endpoint Detection

   • A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader

   Pages 137-156

9. Back Matter

   Pages 157-237

   PDF

This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.

• Plasma
• VLSI
• electrical engineering
• material
• model
• semiconductor

• Philips Components, Eindhoven, The Netherlands

  A. J. Roosmalen

• Philips Research Laboratories, Eindhoven, The Netherlands

  J. A. G. Baggerman, S. J. H. Brader

Policies and ethics