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An Introduction to Surface-Micromachining

  • Book
  • © 2004

Overview

Authors:
  1. Robert W. Johnstone

    1. Engineering Science, Simon Fraser University, Canada

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    You can also search for this author in PubMed   Google Scholar

  2. M. Parameswaran

    1. Engineering Science, Simon Fraser University, Canada

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    You can also search for this author in PubMed   Google Scholar

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Table of contents (16 chapters)

  1. Front Matter

    Pages i-xiii
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  2. Introduction

    1. Introduction

      • Robert W. Johnstone, M. Parameswaran
      Pages 1-5

  3. Fabrication

    1. Front Matter

      Pages 7-7
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    2. Microfabrication Processes

      • Robert W. Johnstone, M. Parameswaran
      Pages 9-28

    3. Micromachining Technologies

      • Robert W. Johnstone, M. Parameswaran
      Pages 29-41

  4. Design

    1. Front Matter

      Pages 43-43
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    2. Microscale Physics

      • Robert W. Johnstone, M. Parameswaran
      Pages 45-62

    3. Mechanics

      • Robert W. Johnstone, M. Parameswaran
      Pages 63-73

    4. Design Rules

      • Robert W. Johnstone, M. Parameswaran
      Pages 75-79

    5. Non-Ideal Processes

      • Robert W. Johnstone, M. Parameswaran
      Pages 81-92

    6. Design Techniques

      • Robert W. Johnstone, M. Parameswaran
      Pages 93-99

  5. Devices

    1. Front Matter

      Pages 101-101
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    2. Electrical Components

      • Robert W. Johnstone, M. Parameswaran
      Pages 103-113

    3. Mechanical Components

      • Robert W. Johnstone, M. Parameswaran
      Pages 115-134

    4. Electrostatic Actuators

      • Robert W. Johnstone, M. Parameswaran
      Pages 135-152

    5. Electro-Thermal-Compliant Actuators

      • Robert W. Johnstone, M. Parameswaran
      Pages 153-164

    6. Raised Structures

      • Robert W. Johnstone, M. Parameswaran
      Pages 165-173

  6. Processes

    1. Front Matter

      Pages 175-175
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    2. PolyMUMP∡ Process

      • Robert W. Johnstone, M. Parameswaran
      Pages 177-179

    3. SUMMiTâ„¢ Process

      • Robert W. Johnstone, M. Parameswaran
      Pages 181-182
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Keywords

About this book

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Authors and Affiliations

  • Engineering Science, Simon Fraser University, Canada

    Robert W. Johnstone, M. Parameswaran

Bibliographic Information

  • Book Title: An Introduction to Surface-Micromachining

  • Authors: Robert W. Johnstone, M. Parameswaran

  • DOI: https://doi.org/10.1007/978-1-4020-8021-0

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 2004

  • Hardcover ISBN: 978-1-4020-8020-3Published: 03 June 2004

  • Softcover ISBN: 978-1-4757-1077-9Published: 12 December 2012

  • eBook ISBN: 978-1-4020-8021-0Published: 31 May 2004

  • Edition Number: 1

  • Number of Pages: XIII, 189

  • Topics: Circuits and Systems, Mechanical Engineering, Electrical Engineering

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