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Table of contents(17 chapters)
About this book
Authors and Affiliations
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General Technology Division, International Business Machines Corporation, New York, USA
Wayne M. Moreau
Bibliographic Information
Book Title: Semiconductor Lithography
Book Subtitle: Principles, Practices, and Materials
Authors: Wayne M. Moreau
Series Title: Microdevices
DOI: https://doi.org/10.1007/978-1-4613-0885-0
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Plenum Press, New York 1988
Softcover ISBN: 978-1-4612-8228-0Published: 22 February 2012
eBook ISBN: 978-1-4613-0885-0Published: 06 December 2012
Edition Number: 1
Number of Pages: 952
Topics: Electrical Engineering, Optical and Electronic Materials